DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD

Title:

DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD

Document Type and Number:

WIPO Patent Application WO/2016/084261

Kind Code:

A1

Abstract:

In the present invention, the surface shape of an object of inspection 100 is measured on the basis of the interference state of light irradiated onto the object of inspection via a spatial optical phase modulator 26, reflected by the object of inspection 100, and obtained via the spatial optical phase modulator 26; the surface magnetic field distribution of the object of inspection 100, which is magnetized by an excitation device 3 for magnetizing the object of inspection 100, is measured on the basis of the interference state of the light irradiated onto the object of inspection via the spatial optical phase modulator 26, reflected by the object of inspection 100, and obtained via the spatial optical phase modulator 26; and data for an unusual magnetic field part 100b on the surface of the object of inspection 100 is separated from magnetic field distribution data that is the measurement results for the magnetic field distribution of the object of inspection 100 on the basis of surface shape data that is the measurement results for the surface shape of the object of inspection 100. As a result, it is possible to suppress the reduction of magnetic field distribution measurement accuracy that occurs as a result of the surface shape of an object of inspection and enhance defect inspection accuracy.

Inventors:

ENDOU HISASHI (JP)
TAKAGI HIROYUKI (JP)
GOTO TAICHI (JP)
INOUE MITSUTERU (JP)

Application Number:

PCT/JP2014/081653

Publication Date:

June 02, 2016

Filing Date:

November 28, 2014

Export Citation:

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Assignee:

HITACHI LTD (JP)

International Classes:

G01N27/83

Foreign References:

JPH07287059A	1995-10-31
JPH09280953A	1997-10-31
JP2010537355A	2010-12-02
JP2005315590A	2005-11-10
JP2014153318A	2014-08-25

Other References: