Title:
DEFECT INSPECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/261302
Kind Code:
A1
Abstract:
The present invention comprises: a camera (10) that acquires a plurality of images of the same inspection region; and a controller (100) that has a defect candidate extraction unit (105) which extracts a defect candidate region from each of the plurality of images and a feature amount calculation unit (106) which, for at least two images among the plurality of images, calculates a feature amount of each region corresponding to a defect candidate region in the entirety of each image, wherein the plurality of images include image of differing lighting conditions, and, when acquiring the plurality of images, the camera (10) is fixed so as not to move relative to a workpiece (W) until all images are acquired.
Inventors:
TACHI TOMOHIRO (JP)
Application Number:
PCT/JP2021/022398
Publication Date:
December 30, 2021
Filing Date:
June 11, 2021
Export Citation:
Assignee:
YASUNAGA KK (JP)
International Classes:
G01N21/88
Foreign References:
| JP2017040612A | 2017-02-23 | |||
| JPH109838A | 1998-01-16 | |||
| JP2012112915A | 2012-06-14 | |||
| US20040000652A1 | 2004-01-01 |
Attorney, Agent or Firm:
MAEDA & PARTNERS (JP)
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