DEFECT INSPECTION IMAGE GENERATING DEVICE AND DEFECT INSPECTION IMAGE GENERATING METHOD

WIPO Patent Application WO/2018/198828

A1

An objective of the present invention is to generate a defect inspection image with which a part corresponding to a defect consisting of mild unevenness is easily detected while suppressing the amount of time required. In order to achieve this objective, provided is a defect inspection image generating device that comprises: an illumination light source that emits illumination light onto a target; a phase control unit that shifts the phase of an intensity change of the illumination light a plurality of times; an image capturing device; an image capturing control unit that causes the image capturing device to capture an image of a contrast pattern formed on the target for each of the plurality of phase shifts and generate a brightness image; a phase image generating unit that generates, on the basis of the plurality of brightness images, at least two phase images which have phase values wrapped in a prescribed angular range as pixel values and in which the positions of phase jumps are different from each other; an edge image generating unit that generates at least two edge images corresponding to the at least two phase images; and an inspection image generating unit that generates a defect inspection image by extracting edge regions that exist at the same positions in the at least two edge images.

TAKATA NAOYA (JP)

PCT/JP2018/015535

November 01, 2018

April 13, 2018

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KONICA MINOLTA INC (JP)

G01N21/88; G06T1/00

JP2000018932A	2000-01-21
JP2008241483A	2008-10-09
JP3197766U	2015-06-04
US20140063230A1	2014-03-06

YOSHITAKE Hidetoshi et al. (JP)

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