Title:
DEFECT INSPECTION METHOD AND DEVICE USING SAME
Document Type and Number:
WIPO Patent Application WO/2012/017761
Kind Code:
A1
Abstract:
In order to enable inspections to be conducted at a sampling rate higher than the pulse oscillation frequency of a pulsed laser emitted from a pulsed laser light source, without damaging samples, a defect inspection method is disclosed, wherein: the light from a single pulse of a pulsed light emitted from the pulsed light source is split into a plurality of pulses; a sample is irradiated with this divided pulsed light; scattered light produced by the sample due to the irradiation is focused and detected; and defects on the sample are detected by using information obtained by focusing and detecting the scattered light from the sample. Said defect inspection method is configured such that the splitting of light from a single pulse into a plurality of pulses is controlled in such a manner that the peak values of the split pulses are virtually uniform.
Inventors:
SHIBATA Yukihiro (HITACHI LTD., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
芝田 行広 (〒17 神奈川県横浜市戸塚区吉田町２９２番地 株式会社日立製作所 横浜研究所内 Kanagawa, 〒2440817, JP)
NAKAO Toshiyuki (HITACHI LTD., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
中尾 敏之 (〒17 神奈川県横浜市戸塚区吉田町２９２番地 株式会社日立製作所 横浜研究所内 Kanagawa, 〒2440817, JP)
芝田 行広 (〒17 神奈川県横浜市戸塚区吉田町２９２番地 株式会社日立製作所 横浜研究所内 Kanagawa, 〒2440817, JP)
NAKAO Toshiyuki (HITACHI LTD., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
中尾 敏之 (〒17 神奈川県横浜市戸塚区吉田町２９２番地 株式会社日立製作所 横浜研究所内 Kanagawa, 〒2440817, JP)
Application Number:
JP2011/065212
Publication Date:
February 09, 2012
Filing Date:
July 01, 2011
Export Citation:
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shimbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
SHIBATA Yukihiro (HITACHI LTD., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
芝田 行広 (〒17 神奈川県横浜市戸塚区吉田町２９２番地 株式会社日立製作所 横浜研究所内 Kanagawa, 〒2440817, JP)
NAKAO Toshiyuki (HITACHI LTD., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
SHIBATA Yukihiro (HITACHI LTD., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
芝田 行広 (〒17 神奈川県横浜市戸塚区吉田町２９２番地 株式会社日立製作所 横浜研究所内 Kanagawa, 〒2440817, JP)
NAKAO Toshiyuki (HITACHI LTD., 292, Yoshida-cho, Totsuka-ku, Yokohama-sh, Kanagawa 17, 〒2440817, JP)
International Classes:
G01N21/956; H01L21/66
Attorney, Agent or Firm:
POLAIRE I.P.C. (7-1 Hatchobori 2-chome, Chuo-ku Tokyo, 32, 〒1040032, JP)
Claims:
Previous Patent: SCROLL-TYPE FLUID MACHINE
Next Patent: LIGHT QUANTITY DETECTION METHOD AND DEVICE THEREFOR
Next Patent: LIGHT QUANTITY DETECTION METHOD AND DEVICE THEREFOR