Title:
DEFECT INSPECTION METHOD AND DEFECT INSPECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2014/103719
Kind Code:
A1
Abstract:
In order to achieve highly precise alignment of inspection images when integrating a plurality of inspection images having different imaging conditions to improve inspection performance, and in order to achieve highly precise alignment of images acquired at different inspection angles and different polarization states, an inspection device is configured to comprise: an image acquiring unit that acquires image data, under a plurality of imaging conditions, for a sample; a feature extracting unit that extracts at least one feature point; a position correction calculating unit that calculates, on the basis of the feature point, the amount of position correction for the plurality of image data sets; a position correcting unit that corrects the position of the plurality of image data sets with the amount of position correction; and an integrating unit that detects defects by integrating a plurality of data sets for which position correction is done.
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Inventors:
URANO TAKAHIRO (JP)
HONDA TOSHIFUMI (JP)
HONDA TOSHIFUMI (JP)
Application Number:
PCT/JP2013/083192
Publication Date:
July 03, 2014
Filing Date:
December 11, 2013
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G01N21/956
Foreign References:
| JP2010175270A | 2010-08-12 | |||
| JP2008268141A | 2008-11-06 | |||
| JP2012112915A | 2012-06-14 | |||
| JP2009281898A | 2009-12-03 | |||
| JP2008286586A | 2008-11-27 | |||
| JP2010048730A | 2010-03-04 | |||
| JP2012127682A | 2012-07-05 |
Attorney, Agent or Firm:
POLAIRE I. P. C. (JP)
Polaire Intellectual Property Corporation (JP)
Polaire Intellectual Property Corporation (JP)
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