Title:
DEFECT INSPECTION SYSTEM, DEFECT INSPECTION DEVICE, AND DEFECT INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2022/264362
Kind Code:
A1
Abstract:
This defect inspection system (100) comprises an excitation unit (10) for exciting elastic waves in an inspection object (P), a measurement unit (30) for imaging a measurement region (Pa) of the outer surface of the inspection object (P) to measure the measurement region (Pa), a body casing part (40) inside which the measurement unit (30) is disposed, a movement mechanism (60) disposed such that the body casing part (40) can be moved along the outer surface of the inspection object (P), and a control unit (70) configured so as to sequentially acquire linear imaging results (D) in each of a plurality of measurement positions of the measurement region (Pa) with the movement by the movement mechanism (60), and acquire a two-dimensional distribution of excitation states for defect inspection in the measurement region (Pa) on the basis of the linear imaging results (D).
Inventors:
HATAHORI TAKAHIDE (JP)
TAKUBO KENJI (JP)
TAKUBO KENJI (JP)
Application Number:
PCT/JP2021/023044
Publication Date:
December 22, 2022
Filing Date:
June 17, 2021
Export Citation:
Assignee:
SHIMADZU CORP (JP)
International Classes:
G01N29/24; G01N29/06
Foreign References:
| JP2012127897A | 2012-07-05 | |||
| JP2012047607A | 2012-03-08 | |||
| JPH0961386A | 1997-03-07 | |||
| JP2018169204A | 2018-11-01 | |||
| JPH0192607A | 1989-04-11 | |||
| JP2007024674A | 2007-02-01 | |||
| JP2019164010A | 2019-09-26 |
Attorney, Agent or Firm:
MIYAZONO, Hirokazu (JP)
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