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Title:
DEFECT MEASUREMENT DEVICE, DEFECT MEASUREMENT METHOD, AND INSPECTION PROBE
Document Type and Number:
WIPO Patent Application WO/2019/107575
Kind Code:
A1
Abstract:
This inspection probe (100) comprises a Hall effect sensor (3) for detecting the density of magnetic flux flowing through a magnetic circuit formed by a yoke (1), a magnet (2), and a magnetic pipe (P). A second outer peripheral surface (12a) of the yoke (1) is positioned further to the magnetic pipe (P) side than a first outer peripheral surface (11a).

Inventors:
TADA TOYOKAZU (JP)
SUETSUGU HIDEHIKO (JP)
Application Number:
PCT/JP2018/044383
Publication Date:
June 06, 2019
Filing Date:
December 03, 2018
Export Citation:
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Assignee:
SUMITOMO CHEMICAL CO (JP)
International Classes:
G01N27/82
Foreign References:
JPS52149184A1977-12-12
JP2017026353A2017-02-02
JPH03118465A1991-05-21
JPS5730943A1982-02-19
JP2002195984A2002-07-10
JP2017026354A2017-02-02
US20120253696A12012-10-04
JP2004212161A2004-07-29
JP2017026353A2017-02-02
Other References:
See also references of EP 3719490A4
Attorney, Agent or Firm:
HARAKENZO WORLD PATENT & TRADEMARK (JP)
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