Title:
DEFECT OBSERVATION METHOD AND DEVICE THEREFOR
Document Type and Number:
WIPO Patent Application WO/2013/118351
Kind Code:
A1
Abstract:
The purpose of the present invention is to enable detection of a defect signal which is small enough to be buried in a background noise, by separating the same from the background noise, so that a smaller defect on a specimen can be observed. Provided is a method that is configured such that a defect which is detected of the specimen by another inspection device is detected by using a detection device equipped with an optical microscope and, on the basis of positional information of the detected defect, positional information of the defect detected of the specimen by the another inspection device is corrected in order to observe the defect by using an SEM, wherein the detection of the defect on the specimen by the detection device is carried out such that: two illuminating rays having the same wavelength are irradiated to the specimen from the opposite directions on the same incidence plane at the same incidence angle in order to cause the two illuminating rays to interfere with each other so as to form a stationary wave on the specimen; scattered ray components generated by minute irregularities on the specimen surface are removed, by using a spatial filter, from scattered rays from the specimen which is illuminated by the stationary wave; an image which is formed by the scattered rays not removed by the spatial filter is detected; and the detected image formed by the scattered rays is processed in order to detect the defect on the specimen which was not detected by the another inspection device.
Inventors:
OTANI YUKO (JP)
HONDA TOSHIFUMI (JP)
MATSUMOTO SHUNICHI (JP)
HONDA TOSHIFUMI (JP)
MATSUMOTO SHUNICHI (JP)
Application Number:
PCT/JP2012/077244
Publication Date:
August 15, 2013
Filing Date:
October 22, 2012
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G01N23/225; G01N21/956; H01L21/66
Foreign References:
| JP2010096554A | 2010-04-30 | |||
| JP2011106974A | 2011-06-02 | |||
| JP2007225563A | 2007-09-06 | |||
| JPS6312943A | 1988-01-20 |
Attorney, Agent or Firm:
POLAIRE I. P. C. (JP)
Polaire Intellectual Property Corporation (JP)
Polaire Intellectual Property Corporation (JP)
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Claims: