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Patent Searching and Data


Title:
DEFECT OCCURRENCE PROCESS ANALYSIS DEVICE AND DEFECT OCCURRENCE PROCESS ANALYSIS METHOD
Document Type and Number:
WIPO Patent Application WO/2014/097827
Kind Code:
A1
Abstract:
This defect occurrence process analysis device is provided with: a mapping unit (521) which maps final defect information obtained in a final inspection process to coordinates set on a member according to defect type; an association unit (522) which associates intermediate defect information obtained in an intermediate inspection process and corrected result information obtained after a correction process for a defect detected in the intermediate inspection process has been performed with each other; a classification mapping unit (524) which, on the basis of the result of the classification of the intermediate defect information by a classification unit (523), maps the intermediate defect information to the coordinates set on the member according to the corrected result information; and a map display unit (525) which displays respective maps generated by the mapping unit (521) and the classification mapping unit (524) on the process-by-process basis. The present invention is applicable to manufacturing processes for an organic EL display panel and a liquid crystal display panel.

Inventors:
KYOHO MASANORI
Application Number:
PCT/JP2013/081641
Publication Date:
June 26, 2014
Filing Date:
November 25, 2013
Export Citation:
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Assignee:
SHARP KK (JP)
International Classes:
G01M11/00; G01N21/956; G02F1/13
Foreign References:
JP2009264865A2009-11-12
JP2008096302A2008-04-24
Other References:
YUJI TANAKA: "LCD Seizo Kotei ni Okeru Saishin Kensa Gijutsu", GEKKAN DISPLAY, vol. 12, no. 12, 1 December 2006 (2006-12-01), pages 30 - 34
Attorney, Agent or Firm:
SAMEJIMA, Mutsumi et al. (JP)
Mutsumi Sameshima (JP)
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