Title:
DEFLATION SYSTEM AND TECHNOLOGY THEREOF
Document Type and Number:
WIPO Patent Application WO/2013/178040
Kind Code:
A1
Abstract:
Disclosed are a deflation system and technology thereof. The deflation system comprises an electric arc titanium pump (12) and a vacuum chamber (13), and the electric arc titanium pump (12) is communicated with the vacuum chamber directly. Therefore, a high-vacuum valve between the electric arc titanium pump (12) and the vacuum chamber (13) can be eliminated, so that the structure is simple and the cost of the deflation system is reduced. According to the deflation system, after the deflation operation of the electric arc titanium pump (12) is finished and before the vacuum chamber (13) is exposed to the air, a titanium target is cooled for a certain time, so as to reduce the oxidization loss on the surface of the titanium target and prolong the service life of the titanium target.
More Like This:
| JP2514465 | [Name of device] Getter pump |
| JPH03196457 | TITANIUM SUBLIMATION PUMP |
Inventors:
CHU QI (CN)
CHU XIN (CN)
CHU XIN (CN)
Application Number:
PCT/CN2013/076219
Publication Date:
December 05, 2013
Filing Date:
May 24, 2013
Export Citation:
Assignee:
CHU QI (CN)
CHU XIN (CN)
CHU XIN (CN)
International Classes:
F04B37/02; F04B37/14
Foreign References:
| CN102691640A | 2012-09-26 | |||
| CN201891569U | 2011-07-06 | |||
| CN2239511Y | 1996-11-06 | |||
| CN101936278A | 2011-01-05 | |||
| JPH08232840A | 1996-09-10 | |||
| SU528386A1 | 1976-09-15 |
Attorney, Agent or Firm:
SHENZHEN ZHONGYI PATENT AND TRADEMARK OFFICE (CN)
深圳中一专利商标事务所 (CN)
深圳中一专利商标事务所 (CN)
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