Title:
DEGASSING DEVICE AND METHOD OF DEVELOPER CONCENTRATION CONTROL SYSTEM, AND DEVELOPER CONCENTRATION CONTROL SYSTEM
Document Type and Number:
WIPO Patent Application WO/2022/121022
Kind Code:
A1
Abstract:
Disclosed are a degassing device and method of a developer concentration control system, and a developer concentration control system. The degassing device comprises a degassing module, a linkage valve, and a diaphragm vacuum pump. The degassing module is connected to a sampling pump by means of a pipeline and receives a developer sample transferred by the sampling pump; the degassing module is connected to a developer concentration monitoring module and transfers the degassed developer to the developer concentration monitoring module. The linkage valve is arranged on a pipeline that connects the degassing module and the diaphragm vacuum pump; when the diaphragm vacuum pump stops, the linkage valve is opened, and a pipeline between the degassing module and the linkage valve no longer maintains a vacuum state; when the diaphragm vacuum pump is started, the linkage valve is closed. According to the technical solution of the present invention, the accuracy of developer concentration monitoring can be improved, and a fault that may occur when the diaphragm pump is started again can be avoided.
Inventors:
WEI ZHIQIANG (CN)
Application Number:
PCT/CN2020/140596
Publication Date:
June 16, 2022
Filing Date:
December 29, 2020
Export Citation:
Assignee:
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECH CO LTD (CN)
International Classes:
B01D19/00; B01D19/02; F04B45/04
Foreign References:
| CN103376714A | 2013-10-30 | |||
| JPH0568808A | 1993-03-23 | |||
| US10429328B2 | 2019-10-01 | |||
| CN105521627A | 2016-04-27 |
Attorney, Agent or Firm:
PURPLEVINE INTELLECTUAL PROPERTY (SHENZHEN) CO., LTD. (CN)
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