DEGUMMING DEVICE AND DEGUMMING SYSTEM

WIPO Patent Application WO/2023/029926

A1

A degumming device and a degumming system. The degumming device comprises: a degumming tank (101) and a spraying assembly, wherein the inside of the tank body of the degumming tank (101) is configured for hanging a wafer holder (103), and for accommodating a silicon wafer (104) bonded to one side of the wafer holder (103) close to the bottom of the tank; and the spraying assembly is mounted on an opposite inner wall in the degumming tank (101) in the lengthwise direction of the wafer holder (103), and the spraying assembly is configured to spray a degumming solution at a bonding portion between the wafer holder (103) and the silicon wafer (104). In the degumming process, the degumming solution can be sprayed at the bonding portion between the wafer holder (103) and the silicon wafer (104) by means of the spraying assembly. Compared with soaking degumming, it is only necessary to spray the degumming solution at the bonding portion, such that the amount of the degumming solution used is less, and the loss of the degumming solution can be reduced.

LUO TAO (CN)
WU SHIMING (CN)
JIANG KUN (CN)
LU MINXING (CN)
ZHAO YUANMING (CN)
LI XIAOPENG (CN)
ZHENG SHILIN (CN)
YANG CHUNWEI (CN)

PCT/CN2022/111627

March 09, 2023

August 11, 2022

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CHUXIONG LONGI SILICON MAT CO LTD (CN)

B28D5/00; B28D7/00

CN215969506U	2022-03-08
CN202601700U	2012-12-12
CN203854109U	2014-10-01
CN203650724U	2014-06-18
CN205614859U	2016-10-05
CN202781469U	2013-03-13
JPH10189503A	1998-07-21

BEIJING RUN ZEHENG INTELLECTUAL PROPERTY LAW FIRM (CN)

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