Title:
DEPOSIT DETECTION DEVICE FOR EXHAUST PUMP, AND EXHAUST PUMP
Document Type and Number:
WIPO Patent Application WO/2013/161399
Kind Code:
A1
Abstract:
Provided is a deposit detection device for an exhaust pump which can be implemented easily without generating burdens such as the installation of equipment for circulating a gas or the addition of or changing of a device operating mode. This deposit detection device is constructed having: a means (52) for detecting the motor current value of a motor which rotationally drives a rotating body; a current value storage unit (103) that stores only the detected motor current values which are equal to or greater than a set value; an average value calculation unit (104) that calculates an average value per unit time for the stored motor current values; an average value storage unit (105) that stores the calculated average values; an approximation line calculation unit (106) that arranges the stored average values in time series and obtains a primary approximation line for the average values; and a difference value calculation unit (108) that obtains a value for the difference between a predicted motor current value calculated using the primary approximation line and the initial motor current value when the use of the exhaust pump begins. The point in time when the difference value exceeds a predetermined threshold value is determined to be the point in time for maintenance of the exhaust pump.
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Inventors:
ENOMOTO YOSHIHIRO (JP)
Application Number:
PCT/JP2013/056246
Publication Date:
October 31, 2013
Filing Date:
March 07, 2013
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
ENOMOTO YOSHIHIRO (JP)
ENOMOTO YOSHIHIRO (JP)
International Classes:
F04D19/04; H02P29/00
Domestic Patent References:
| WO2011145444A1 | 2011-11-24 | |||
| WO2011145444A1 | 2011-11-24 |
Foreign References:
| JP2003232292A | 2003-08-22 | |||
| JP2004117091A | 2004-04-15 | |||
| JP2003232292A | 2003-08-22 |
Other References:
See also references of EP 2843237A4
Attorney, Agent or Firm:
HAYASHI TAKAYOSHI (JP)
Wood Kokichi (JP)
Wood Kokichi (JP)
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