Title:
DEPOSITION APPARATUS COMPRISING METAL BLOCK-COUPLED HEATER ASSEMBLY FOR SUPPLYING PRECURSOR SOURCE
Document Type and Number:
WIPO Patent Application WO/2020/171467
Kind Code:
A1
Abstract:
A deposition apparatus comprising a metal block-coupled heater assembly for supplying a precursor source, of the present invention, comprises: a reaction chamber for supporting a substrate and providing a space required for a deposition process; a precursor storage part for storing a precursor source; a gas line part for supplying a vaporized precursor source to the reaction chamber; and a heater assembly part comprising a metal block for accommodating the precursor storage part and the gas line part therein so as to be coupled thereto, and a heating jacket for heating the metal block.
Inventors:
SHIM JOONHYUNG (KR)
CHOI HYUNGJONG (KR)
HAN GWONDEOK (KR)
LEE JAEHYEOK (KR)
KIM MINSIG (KR)
YOON SUNGWON (KR)
CHOI HYUNGJONG (KR)
HAN GWONDEOK (KR)
LEE JAEHYEOK (KR)
KIM MINSIG (KR)
YOON SUNGWON (KR)
Application Number:
PCT/KR2020/001956
Publication Date:
August 27, 2020
Filing Date:
February 12, 2020
Export Citation:
Assignee:
UNIV KOREA RES & BUS FOUND (KR)
International Classes:
C23C16/455; C23C16/448
Foreign References:
| KR20130055703A | 2013-05-28 | |||
| KR20120002140A | 2012-01-05 | |||
| JP2006111961A | 2006-04-27 | |||
| KR20060111321A | 2006-10-27 | |||
| KR20060006349A | 2006-01-19 |
Attorney, Agent or Firm:
KIM, Jungyun et al. (KR)
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