Title:
DEPOSITION APPARATUS HAVING LIGHT IRRADIATION PORTION FOR REMOVING FOREIGN SUBSTANCE
Document Type and Number:
WIPO Patent Application WO/2012/124928
Kind Code:
A2
Abstract:
The present invention relates to a deposition apparatus having a light irradiation portion for removing foreign substances, the deposition apparatus having the light irradiation portion for removing foreign substances of the present invention comprising: a chamber portion for accommodating a substrate therein so that a source is deposited on the substrate; the light irradiation portion for irradiating ultraviolet light toward the substrate; a window, which is made from a light transmitting material and arranged between the light irradiation portion and the substrate, for transmitting the ultraviolet light that is generated from the light irradiation portion into the chamber portion; and a light transmitting portion, which is inside the chamber portion and comprises a heating member, for eliminating foreign substances that inhibit the transmission of the ultraviolet light through the window, by means of generating heat.
Inventors:
KIM TAE HWAN (KR)
RYU WOON SEON (KR)
NAMGOONG SUNG TAE (KR)
RYU WOON SEON (KR)
NAMGOONG SUNG TAE (KR)
Application Number:
PCT/KR2012/001686
Publication Date:
September 20, 2012
Filing Date:
March 08, 2012
Export Citation:
Assignee:
SNU PRECISION CO LTD (KR)
KIM TAE HWAN (KR)
RYU WOON SEON (KR)
NAMGOONG SUNG TAE (KR)
KIM TAE HWAN (KR)
RYU WOON SEON (KR)
NAMGOONG SUNG TAE (KR)
International Classes:
C23C14/24; C23C14/02
Foreign References:
| JPH07147267A | 1995-06-06 | |||
| KR20070088983A | 2007-08-30 | |||
| JPS61234532A | 1986-10-18 |
Attorney, Agent or Firm:
CHO, YOUNG HYUN (KR)
์กฐ์ํ (KR)
์กฐ์ํ (KR)
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Claims:
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