Title:
DEPOSITION APPARATUS AND RECOVERY APPARATUS
Document Type and Number:
WIPO Patent Application WO/2012/073908
Kind Code:
A1
Abstract:
At least a part of a deposition preventing board (3) and a shutter (4) is formed by connecting a plurality of small pieces (3a, 3b, 4a, 4b), and each of the small pieces (3a, 3b, 4a, 4b) is provided with a connecting section with which the small pieces can be connected together and separated from each other.
Inventors:
SONODA, Tohru (())
園田 通 (())
KAWATO, Shinichi (())
川戸 伸一 (())
園田 通 (())
KAWATO, Shinichi (())
川戸 伸一 (())
Application Number:
JP2011/077433
Publication Date:
June 07, 2012
Filing Date:
November 28, 2011
Export Citation:
Assignee:
SHARP KABUSHIKI KAISHA (22-22, Nagaike-cho Abeno-ku, Osaka-sh, Osaka 22, 〒5458522, JP)
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町２２番２２号 Osaka, 〒5458522, JP)
SONODA, Tohru (())
園田 通 (())
KAWATO, Shinichi (())
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町２２番２２号 Osaka, 〒5458522, JP)
SONODA, Tohru (())
園田 通 (())
KAWATO, Shinichi (())
International Classes:
C23C14/00; C23C14/24; H01L51/50; H05B33/10
Attorney, Agent or Firm:
HARAKENZO WORLD PATENT & TRADEMARK (Daiwa Minamimorimachi Building, 2-6 Tenjinbashi 2-chome Kita, Kita-ku, Osaka-sh, Osaka 41, 〒5300041, JP)
Download PDF:
Claims: