SAUER ANDREAS (DE)
HEIMEL OLIVER (DE)
ZANG SEBASTIAN GUNTHER (DE)
SAUER ANDREAS (DE)
HEIMEL OLIVER (DE)
WO2016070267A1 | 2016-05-12 |
JP2011105962A | 2011-06-02 | |||
US5338913A | 1994-08-16 | |||
US20090308316A1 | 2009-12-17 |
CLAIMS 1 . A deposition apparatus ( 100) for a vacuum deposition process, comprising: a vacuum chamber (130); a movable deposition source (1 10) arranged in the vacuum chamber; and a supply arrangement (120) providing a supply passage (124) for media supply lines for the movable deposition source, wherein the supply arrangement comprises an axially deflectable element (122). 2. The deposition apparatus according to claim 1 , wherein the axially deflectable element (122) is an expansion joint, particularly a bellow, more particularly an edge welded bellow. 3. The deposition apparatus according to claim 1 or 2, wherein the movable deposition source (1 10) is linearly movable in a first direction ( 1 50), and wherein an axis of the axially deflectable element (122) extends in the first direction . 4. The deposition apparatus according to any of the preceding claims, wherein the supply arrangement (122) is configured for passing the media supply lines from an environment outside the vacuum chamber along the supply passage to an atmospheric casing of the movable deposition source (1 10). 5. The deposition apparatus according to any of claims 1 to 4, further comprising the media supply lines ( 140) extending from the movable deposition source (1 10) through the supply passage (124), wherein the media supply lines comprise at least one or more of: a cooling channel, an electrical connection, a cable for supplying the movable deposition source with power, a cable for supplying the movable deposition source with signals, a cable for guiding sensor signals, a gas channel, and a water channel . 6. The deposition apparatus according to any of claims 1 to 5, wherein the supply arrangement (120) further comprises a stiff tube element (2 1 0), and wherein an inner volume of the stiff tube element forms the supply passage. 7. The deposition apparatus according to claim 6, wherein the stiff tube element [2 10] linearly extends in a first direction ( 1 50) through an opening in a wall of the vacuum chamber (130). 8. The deposition apparatus according to claim 7, wherein a first end of the axiai ly deflectable element is scalingly connected to a portion of the stiff tube element (2 10 ) protruding out of the v acuum chamber (130) and/or wherein a second end of the ax iaily deflectable element is scal ingly connected to the wall of the v acuum chamber. 9. The deposition apparatus according to any of claims 6 to 8, wherein the axiaily deflectable element ( 122 ) surrounds the stiff tube element (210), wherein the inner v olume of the stiff tube element is in fluid connection with an atmospheric environment, and wherein a circumferential volume between the stiff tube element and the axiaily deflectable element is in fluid connection with a main volume of the vacuum chamber. 10. The deposition apparatus according to any of claims 1 to 9. wherein a drive unit for moving the mov able deposition source (1 10) is coupled to a portion of the supply arrangement ( 1 20), particularly to a portion of a stiff tube element (2 10) protruding out of the vacuum chamber. 1 1. The deposition apparatus according to claim 10, wherein the stiff tube element (2 1 0) is configured as a translation element configured for translating a driv ing force of the driv ing unit which is arranged outside the vacuum chamber to the movable deposition source. 12. A vacuum system, comprising: a deposition apparatus ( 1 00) according to any of the preceding claims; and a second vacuum chamber arranged adjacent to the vacuum chamber of the deposition apparatus, wherein the supply arrangement (120) of the deposition apparatus extends at least partially out of the vacuum chamber to a space next to the second vacuum chamber. 13. A method of operating a deposition apparatus, comprising: moving a movable deposition source ( 1 1 0) in a vacuum chamber; and supplying the movable deposition source via media supply lines (140) extending through a supply passage (124) of a supply arrangement ( 120), wherein the supply arrangement comprises an axially deflectable element ( 122 ). 14. The method according to claim 13, wherein the axially deflectable element ( 122 ) contracts or expands in a first direction when the movable deposition source linearly moves in the first direction. 1 5. The method according to any of claims 13 to 14, wherein moving the movable deposition source (1 10) comprises driving the movable deposition source by a drive unit arranged outside the vacuum chamber and coupled to a portion of the supply arrangement, particularly coupled to a stiff tube element (2 1 0) of the supply arrangement protruding outside the vacuum chamber. |
FIELD
[0001] Embodiments of the present disclosure relate to deposition apparatuses for depositing one or more layers, particularly layers including organic materials therein, on a substrate. In particular, embodiments of the present disclosure relate to a material deposition apparatus for depositing evaporated material on a substrate in a vacuum chamber. Embodiments further relate to vacuum deposition systems and methods of operating a deposition apparatus, particularly for OLED manufacturing.
BACKGROUND
[0002] Organic deposition apparatuses are a tool for the production of organic light-emitting diodes (OLED). OLEDs are a special type of light-emitting diode in which the emissive layer comprises a thin-film of certain organic compounds. Organic light emitting diodes (OLEDs) are used in the manufacture of television screens, computer monitors, mobile phones, other hand-held devices, etc., for displaying information. OLEDs can also be used for general space illumination. The range of colors, brightness, and viewing angles possible with OLED displays is greater than that of traditional LCD displays because OLED pixels directly emit light and do not involve a back light. Therefore, the energy consumption of OLED displays is considerably less than that of traditional LCD displays.
[0003] The manufacture of OLED devices typically involves a deposition source for coating a substrate. The deposition source is typically moved with respect to the substrate while evaporated material may be directed toward the substrate. [0004] Deposition sources are typically supplied with supply media during operation. However, supplying a deposition source supply media may be challenging, when the deposition source moves along a source transportation path during deposition. For example, media supply lines may get damaged due to the movement of the source and there may be a risk of an interruption of the media supply. An interrupted or damaged media supply may lead to downtime of the system.
[ 0005] Accordingly, it would be beneficial to reduce the risk of interruptions of a deposition process and downtime of a deposition apparatus. In particular, it would be beneficial to provide a deposition apparatus with a deposition source that is reliably supplied with supply media.
SUMMARY
[0006 ] In light of the above, a deposition apparatus, a vacuum system, and a method of operating a deposition apparatus are prov ided. Further aspects, benefits, and features of the present disclosure arc apparent from the claims, the description, and the accompanying draw ings.
[0007] According to one aspect of the present disclosure, a deposition apparatus for a v acuum deposition process is prov ided. The deposition apparatus includes a vacuum chamber; a movable deposition source arranged in the vacuum chamber; and a supply arrangement providing a supply passage for media supply lines for the movable deposition source, wherein the supply arrangement comprises an ax ially deflectable element.
[0008] According to another aspect of the present disclosure, a vacuum system is prov ided. The vacuum system includes a deposition apparatus according to any of the embodiments described herein; and a second v acuum chamber arranged adjacent to the v acuum chamber of the deposition apparatus, wherein the supply arrangement of the deposition apparatus extends at least partial ly out of the v acuum chamber to a space next to the second vacuum chamber. [ 0009] According to a further aspect of the present disclosure, a method of operating a deposition apparatus is provided. The method includes mov ing a movable deposition source in a v acuum chamber; and supplying the movable deposition source via media supply lines extending through a supply passage of a supply arrangement, wherein the supply arrangement comprises an axial ly deflectable element.
BRIEF DESCRIPTION OF THE DRAWINGS
[001 0 ] So that the manner in which the above recited features of the present disclosure can be understood in detail, a more particular description of the disclosure, briefly summarized above, may be had by reference to embodiments. The accompanying drawings relate to embodiments of the disclosure and are described in the follow ing:
Fig. 1 a and l b schematically show a cross-sectional view of a deposition apparatus according to embodiments described herein;
Fig. 2 schematically shows a cross-sectional view of a deposition apparatus according to embodiments described herein;
Fig. 3 schematically shows a cross-sectional view of a deposition apparatus according to embodiments described herein;
Fig. 4 schematically shows a top view of a vacuum system according to embodiments described herein ;
Fig. 5 schematically shows a side view of a vacuum system according to embodiments described herein; and
Fig. 6 shows a chart illustrating a method of operating a deposition apparatus according to embodiments described herein. DETAILED DESCRIPTION OF EMBODIMENTS
[001 1 ] Reference will now be made in detail to the various embodiments of the disclosure, one or more examples of which arc illustrated in the figures. Within the following description of the drawings, the same reference numbers refer to same components. General ly, only the differences with respect to individual embodiments are described. Each example is provided by way of explanation of the disclosure and is not meant as a limitation of the disclosure. Further, features illustrated or described as part of one embodiment can be used on or in conjunction with other embodiments to yield yet a f urther embodiment. It is intended that the description includes such modifications and v ariations.
[0012] Fig. l a and Fig. l b show a schematic cross-sectional view of a deposition apparatus 100 for a vacuum deposition process.
[0013] The deposition apparatus 100 includes a vacuum chamber 130. In particular, the v acuum chamber 1 30 is configured for v acuum deposition and can be, for example, a coating chamber or a processing chamber. The term "vacuum", as used herein, can be understood in the sense of a technical vacuum having a vacuum pressure of less than, for example, 10 mbar. As exemplarily shown in Fig. l a and Fig. 1 b, the deposition apparatus 1 00 includes a movable deposition source 1 1 0. The mov able deposition source 1 1 0 may be a device or assembly configured for providing a source of material to be deposited on a substrate. In particular, the mov able deposition source 1 1 0 may be an ev aporation source configured to direct an ev aporated material toward the substrate. For example, the mov able deposition source 1 10 may be configured for coating a substrate with organic material. For the purposes of the present disclosure, the movable deposition source 1 1 0 may also be understood as a movable consumer which consumes supply media which are supplied to the moveable deposition source.
[0014] Deposition apparatuses according to embodiments described herein may be used for display manufacture on large area substrates. Large area substrates or carriers supporting a large area substrate, i.e. large area carriers, may have a size 2 of at least 0. 1 74 nr. Typically, the size of the carrier can be about 1 .4 m to about
2 2
8 m , more typically about 2 m to about 9 nr or even up to 12 m 2 .
[ 001 5] As exemplariiy shown in Figs, l a and Fig. lb, a movable deposition source 1 10 may be arranged inside the vacuum chamber 130 of the deposition apparatus 100. The vacuum chamber 130 is adapted to maintain a vacuum inside the vacuum chamber volume 1 70. An atmospheric environment 180, for example, an atmospheric environment with an atmospheric pressure of about 1 bar, may surround the vacuum chamber. The movable deposition source 1 10 may be movable in a first direction 1 50 in the v acuum chamber 130. For example, the mov able deposition source 1 10 may be mov able along tracks provided in the vacuum chamber 1 30. In some embodiments, the movable deposition source 1 10 may be mov able along a linear path, i.e. the source movement may be a straight translational movement.
[0016] In Fig. l a, the movable deposition source 1 10 is at a first position. The movable deposition source 1 1 0 may be movable along a source transportation path in the vacuum chamber 130, e.g. in a deposition chamber or processing chamber. Evaporated material may be directed toward one or more substrates while the movable deposition source 1 10 moves along the source transportation path, e.g. between the first position and a second position. Accordingly, the source transportation path may extend between the first position and the second position.
[00 ! 7] In some embodiments, the source transportation path may have a length, for example, the distance between the first position and the second position, of 0.5 m or more, particularly 1 m or more, more particularly about 2 m. The length of the transportation path may be less than 10 m, for example, less than 8 m, less than 5 or less than 3 m. The substrate may be stationary during the deposition by the movable deposition source 1 10. For example, the deposition of material on a stationary substrate with a moving deposition source may be favorable for, but not limited to, large area substrates. [0018] In Fig. lb, the movable deposition source 1 1 0 has moved from the first position, exemplarily shown in Fig. 1 a, to the second position in the vacuum chamber 130. In some embodiments, the movement of the movable deposition source 1 10 is a continuous movement or a step-wise movement from the first position to the second position along a source transportation path. During the source movement, evaporated material may be deposited on a substrate that is arranged in a deposition area in the vacuum chamber 130.
[ 0019] In some embodiments, a source drive for moving the movable deposition source along the source transportation path may be provided. The source drive may include a driv ing unit configured for moving the movable deposition source along tracks in a vacuum chamber. In some embodiments, a holding dev ice such as a magnet ic levitation device may be prov ided for carrying at least a part of the weight of the movable deposition source during the movement of the movable deposition source. The driving force to be generated by the source drive may be reduced and particle generation due to friction can be decreased.
[0020] According to embodiments described herein, the deposition apparatus 1 00 includes a supply arrangement 1 20, as shown in Figs. 1 a and Fig. l b. The supply arrangement 1 20 may be configured as a feed-through for guiding media supply lines 140 from an environment of the vacuum chamber 130 to the movable deposition source 1 1 0 through a wall of the vacuum chamber. The supply arrangement 1 20 provides a supply passage 124 for the media supply lines 140 for the movable deposition source I 10. For example, the supply arrangement 1 20 forms a supply passage 1 24 for media supply l ines 140 that supply the deposition source with supply media such as electricity, cooling fluids and/or signals. [002 1 ] The supply passage 1 24 may be a tubular supply passage, i.e. the supply arrangement 120 may provide a passage to the movable deposition source 1 10 that is surrounded by a tubular clement. In particular, the supply arrangement 120 according to embodiments described herein may provide a supply passage 1 24 with an increased space available for media supply lines 140. [0022] For example, the supply passage 124 may have a diameter of 50 mm or more, particularly of 100 mm or more, more particularly about 200 mm, or more. In some embodiments, the cross-sectional area of the supply passage 124 for arranging the media supply l ines is 50 cm 2 , in particular 1 00 cm 2 or more, more particularly 300 cm 2 or more.
[ 0023] In particular, a first end of the supply arrangement 1 20 can be coupled to the movable deposition source 1 1 0. The supply passage 1 24 of the supply arrangement 120 may extend through a wall of the vacuum chamber 1 30. In particular, the supply arrangement 1 20 may extend from the movable deposition source 1 10 through an opening of the vacuum chamber 130 to an atmospheric environment 180. In some embodiments, a second end of the supply arrangement 1 20 is coupled to a wall of the vacuum chamber 130. In other embodiments, the supply arrangement extends out of the vacuum chamber into an environment of the vacuum chamber.
[0024] In some embodiments, the movable deposition source 1 10 can include an enclosure, e.g. an enclosure for providing a pressure different from a pressure in a main volume of the vacuum chamber. The enclosure may be an atmospheric enclosure configured for providing an atmospheric pressure in an inner volume thereof The media supply lines 140 may be guided through the supply passage into an inner volume of the enclosure. Accordingly, the enclosure may be adapted to maintain an atmospheric environment, such as an atmospheric pressure of about 1 bar. In some embodiments, the supply passage 124 may connect the enclosure to the atmospheric pressure provided outside of the vacuum chamber 130. Accordingly, the supply passage 1 24 can prov ide a fluid connection of the enclosure with the environment outside of the vacuum chamber 1 30.
[0025 ] According to embodiments described herein, the supply arrangement 1 20 includes an ax i ally deflectable element 1 22. The term "ax ial ly deflectable" element can be understood as an clement that is deflectable, i.e. expandable and/or contractible, along a longitudinal axis of the axially deflectable element. As exemplari ly shown in Figs, l a and Fig. l b, the deflectable element 1 22 may be deflectable in the first direction 150. The axial dimension of the axially deflectable element 122 may change in accordance with a displacement of the movable deposition source 1 10. Particularly, the deflectable element 122 may be deflectable in the movement direction of the movable deposition source 1 10. In other words, when the movable deposition source 1 10 moves, the axially deflectable element 122 may expand or contract in accordance with the movement of the movable deposition source 1 10.
[0026] As shown in Figs, l a and Fig. lb, the media supply lines 140 can be passed through the supply passage 124 to the movable deposition source 1 1 0. The supply passage 124 for the media supply lines 140 may adapt to the position of the source so that a reliable supply arrangement can be provided. For example, but not limited to, one or more power cables, one or more communication cables, one or more cooling water supply lines, supply lines for providing a coolant to the deposition source and/or current supply lines for supplying the deposition source with power may extend along the supply passage through the supply arrangement. Further, as the axially deflectable clement 122 may extend and deflect in the axial direction, the supply arrangement 1 20 according to embodiments described herein may be particularly space-saving.
[0027] In particular, as compared to supply arrangements which use an articulated arm with one or more joints providing curved portions, the supply arrangement 120 according to embodiments described herein may be particularly maintenance-friendly and space-saving. For example, the axially deflectable element 122 may extend in a linear direction, i.e. without joints or other bended portions. Space requirements can be reduced and a less complex, maintenance- friendly supply arrangement can be provided. Further, the mass and thus the tare weight of the supply arrangement may be reduced by a supply arrangement that includes an axially deflectable element. Supply arrangements with jointed or articulated levers may use a folding movement when supplying a moving source. The tare weight of a lever connected to the moving source may apply a force in the horizontal direction onto the deposition source. A device for compensating said force may be used. In contrast, providing a supply arrangement with a deflectable element as described herein may be beneficial because a scale-up of the deposition apparatus may be easily possible. This may further reduce the cost of ownership. [0028] In Fig. l a, the movable deposition source 1 10 is at a first position. When the movable deposition source 1 10 is at the first position, the axially deflectable element 122 may be in a contracted state. The contracted state may be a state in which the deflectable element 122 has a smaller length compared to an expanded state. In Fig. l b, the movable deposition source 1 1 0 is at a second position in which the axially deflectable element is in the expanded state.
[0029] The supply arrangement 120 can be coupled to the movable deposition source 1 10. In particular, an end portion of the deflectable element 122 may be coupled to the movable deposition source 1 10. Accordingly, in Fig. l b, the deflectable element 122 is in the expanded state having a larger length compared to the contracted state. The deflectable element 122 has expanded by adapting to the movement of the movable deposition source 1 10. Correspondingly, if the movable deposition source 1 10 moves from a first position to a second position, the axially deflectable element 122 has contracted by adapting to the movement of the movable deposition source 1 10. Accordingly, a dimension, i.e. the length, of the deflectable element 122 has adapted. For example, a length difference of the deflectable element between an expanded state and a contracted state may be 0.5 m or more, more particularly 1 m or more, or even about 2 m or more.
[0030] According to some embodiments, which can be combined with embodiments described herein, an ax is of the axial ly deflectable element 122, for example, the longitudinal axis, may extend in the first direction 1 50. The media supply lines 140 can be guided through the supply passage 1 24 during the movement of the movable deposition source 1 10 which may reduce the risk of kinks, bends, or breakages of the media supply l ines 140. [0031] According to some embodiments, which can be combined with embodiments described herein, the axialiy deflectable element 122 can be an expansion joint. The expansion joint can expand and/or contract according to an outer force appl ied on the expansion joint, such as an axial force or movement. In some embodiments, the expansion joint can be an expansion joint including metal. The metal expansion joint may be a flex ible metal tube. For example, the metal expansion joint may have a gas-tight wall for maintaining a first pressure in an inner volume and a second pressure in a surrounding volume.
[0032] According to some embodiments, which can be combined with embodiments described herein, the deflectable element 122 can be a bellow. The bellow may be made of a gas-tight material so that an interior of the bellow may be sealed off from an exterior of the bellow by the wall of the bellow. A first pressure in the inner volume of the bellow may be, therefore, di fferent from a second pressure in the main volume of the v acuum chamber 1 30. The bellow can be an elastic element or vessel that can expand and/or contract when an outer force is applied thereon. The bel low may be a bellow that returns to an initial state when the outer force is no longer appl ied. In some embodiments, the below may be made of metal or metal alloys.
[0033] According to some embodiments, which can be combined with embodiments described herein, the deflectable element 122 may be an edge welded bellow . Edge welded bellows may be, for example, made by welding together individual metal diaphragms.
[0034] The bellow can be, for example, a l inear bellow that is linearly deflectable, such that the bellow extends or contracts linearly. Bellows can securely seal vacuum to atmosphere and arc able to w ithstand cycle demands.
Bellows can be readily provided for a plurality of source transportation path lengths. This can, for example, reduce the cost of ownership. Further a deposition apparatus may be provided for large source transportation path lengths, for example, for a deposition process for large area substrates. [0035] According to embodiments, which can be combined with embodiments described herein, the axially deflectable element 122 may extend along an axis in a first direction, and the dimension of the axially deflectable element 122 in the first direction 1 50 can be changed by expanding and/or compressing the ax ially deflectable element 122 along the ax is, e.g. by applying an expansion force or a compression force to the axial ly deflectable element 122. For example, the axial ly deflectable element 122 may be a flex ible clement or an elastic element. In some embodiments, the axial ly deflectable clement 122 is an axially bendable element. In some embodiments, the axially deflectable element 122 can also be deflected in a sideway direction, e.g. bended or curved.
[0036] Typically, the axially deflectable element 122 is configured to be sealingly coupled to a wall of the vacuum chamber 130 and/or seal ingly coupled to the movable deposition source 1 1 0. Accordingly, the media supply lines 140 can be prov ided inside the supply passage 124. [0037] According to embodiments, w hich can be combined with other embodiments described herein, the supply arrangement 120 can be configured for feeding the media supply lines 140 from an environment outside the vacuum chamber along the supply passage 324 to an enclosure, in particular an atmospheric casing, of the movable deposition source. The atmospheric casing may be configured to maintain atmospheric pressure when disposed inside the vacuum chamber. The atmospheric casing, which can also be described as an atmospheric housing or an atmospheric box, may house elements for operating the movable deposition source. For example, at least one element selected from the group consisting of: a switch, a valve, a control ler, a cooling unit and a cooling control unit can be provided inside the atmospheric casing. The cooling unit typically cools the movable deposition source 1 1 0 during operation by providing a cooling fluid, such as water. A controll ing unit may control the temperature of the cooling fluid and/or may control the temperature of the movable deposition source 1 10. Further, one or more controllers may be disposed in the atmospheric housing for controll ing control parameters of the deposition process. In l ight thereof, the supply passage 124 may provide an increased space for media supply lines 140, as the supply arrangement 120 can be easily scaled to an applicable size, i.e. by the selection of the diameter of the deflectable element.
[0038] In Figs. 1 a and l b, an inner volume of the axially deflectable element is in fluid connection with the atmospheric environment 180. The term "fluid connection " ' as used herein, can be understood as a fluid flow or exchange between two volumes. For example, a change of one parameter in one volume, such as pressure, can induce a corresponding change in the other volume.
[0039] The term "substrate" as used herein may particularly embrace substantially inflexible substrates, e.g., a wafer, slices of transparent crystal such as sapphire or the like, or a glass plate. How ever, the present disclosure is not limited thereto and the term "substrate" may also embrace flexible substrates such as a web or a foil. For instance, the substrate may be made of a material selected from the group consisting of glass (for instance soda-l ime glass, borosilicate glass etc. ), metal, polymer, ceramic, compound materials, carbon fiber materials or any other material or combination of materials which can be coated by a deposition process.
[0040] The movable deposition source, according to embodiments described herein, may include a crucible con figured to evaporate the material to be deposited and a distribution assembly configured for directing the evaporated material toward the substrate. For example an organic material for depositing a thin film may be guided from the crucible via the distribution assembly through one or more outlets of the distribution assembly toward the substrate. The distribution assembly may include a distribution pipe. [0041 ] According to some embodiments, which can be combined with embodiments described herein, the media supply l ines may extend from the movable deposition source through the supply passage 1 24. The media supply l ines 140 may comprise at least one or more of: a cooling channel, an electrical connection, a cable for supplying the movable deposition source with pow er, a cable for supplying the movable deposition source with signals, a cable for guiding sensor signals, a gas channel, a water channel .
[0042] Fig. 2 schematically shows a deposition apparatus 200 according to embodiments described herein. The deposition apparatus 200 of Fig. 2 may include some or all of the features of the deposition apparatus 100 of Fig. 1 so that reference can be made to above explanations w hich are not repeated here.
[0043] In particular, the deposition apparatus 200 includes a movable deposition source 1 1 0 arranged in the vacuum chamber and a supply arrangement 1 20 configured for supplying the movable deposition source 1 10 with supply media. [ 0044] The supply arrangement 1 20 of the deposition apparatus 200 includes an axially deflectable element 1 22 and a stiff tube element 2 10 w hich prov ides the supply passage 1 24 for the media supply l ines 140.
[0045] In some embodiments, the supply arrangement 1 20 may include a tube element. The tube element may be, for example, an element hav ing a tubular form, such as a cyl indrical tube or a rectangular tube. An inner volume of the tube element may be surrounded by a tube w all . In some embodiments, the tube element is a stiff tube element 2 1 0 as cxemplarily shown in Fig. 2. The stiff tube element 2 1 0 may be made of a stiff material. As cxemplarily shown in Fig. 2, the stiff tube element may be an element that prov ides the supply passage 124, e.g. for the supply lines in an inner volume thereof. The stiff tube element 2 10 may provide an inner volume forming the supply passage 124. In Fig. 2, the stiff tube element 2 10 is a linear tube, e.g. a linear tube made of metal. The stiff tube element may be made of other materials, particularly gas-tight materials, in other embodiments. The material of the stiff tube element may be configured to maintain an atmospheric env ironment in an inner volume of the stiff tube element, while being surrounded by an environment at a subatmospheric pressure.
[ 0046] A first end of the stiff tube element 2 10 may be scal ingly coupled to the movable deposition source 1 10. as is schematically depicted in FIG. 2. The sealing may be configured to seal off a vacuum environment which may surround the stiff tube element from an atmospheric environment provided inside the stiff tube element 210. The stiff tube element 2 10 may extend from the movable deposition source towards an opening of the vacuum chamber 130 and may protrude through the opening out of the vacuum chamber.
[0047] According to some embodiments, which can be combined with embodiments described herein, the stiff tube element 2 10 may linearly extend in the first direction 1 50 through an opening in a wall of the vacuum chamber. A stiff tube element may be a non- flexible element, i.e. an element that is not contractible or extendable upon application of a force, e.g. in the first direction. For example, the stiff tube element can be a hollow metal tube providing suitable rigidness.
[0048] According to embodiments, which can be combined with other embodiments described herein, a first end of the axially deflectable element 122 may be seal ingly connected to a portion of the stiff tube element 2 1 0 protruding out of the vacuum chamber 130. A second end of the axially deflectable element 122 may be seal ingly connected to a wall of the vacuum chamber 1 30. As is show n in Fig. 2, the first end of the axially deflectable element 1 22 may be coupled to the wall of the vacuum chamber 130 by a first coupling portion. The second end of the axially deflectable element 122 may be coupled to the stiff tube element 2 10 by a second coupling portion. The first and the second coupling portions can seal off the vacuum chamber 1 30 to maintain the vacuum provided therein.
[0049] Using the axially deflectable clement as a seal ing element between the vacuum chamber and a portion of the stiff tube element protruding out of the vacuum chamber may be beneficial, since particle generation in a main volume of the vacuum chamber can be reduced and the deposition result can be improved.
[0050] The stiff tube element 2 10 can be movable together with the movable deposition source 1 1 0. Due to the coupling of the movable deposition source 1 10 and the stiff tube element 210, a linear translation of the movable deposition source 1 1 0 may be accompanied by a linear translation of the stiff tube element 2 10. The sti ff tube element 2 1 0 may be movable together with the movable deposition source 1 10, for example, in the first direction 1 50. Accordingly, due to the coupling of the stiff tube element 2 10 to the axially deflectable element 1 22, the axial ly deflectable element 1 22 adapts to the l inear translation of the stiff tube element 2 10. For instance, by linearly translating the movable deposition source 1 10 in the first direction 1 50, the stiff tube element 2 10 follows the l inear translation in the first direction 1 50. Accordingly, the axially deflectable element 122 can compress during the translation in the first direction 1 50. Similarly, the axially deflectable element may expand during a translation of the movable deposition source in an opposite direction.
[005 1 ] According to some embodiments, which can be combined with embodiments described herein, the axially deflectable element 122 may surround the stiff tube element 2 1 0. In particular, at least a section of the stiff tube element may be enclosed by the axially deflectable element 122. The inner volume of the stiff tube element 2 10 can be in fluid connection w ith an atmospheric environment 180. A circumferential volume between the stiff tube element 2 10 and the axially deflectable element 122 can be in fluid connection with a main volume of the vacuum chamber 130. Accordingly, an inner volume of the stiff tube element 2 10 which is connected to the movable deposition source 1 1 0 may be in fluid connection with the atmospheric casing of the movable deposition source 1 10.
[ 0052 ] Fig. 3 shows a deposition apparatus 300 according to embodiments described herein. The deposition apparatus 300 shown in Fig. 3 may include some features or all features of the deposition apparatus 200 shown in Fig. 2 so that reference can be made to the abov e explanations which are not repeated here.
[ 0053] In particular, the deposition apparatus 300 includes the movable deposition source 1 10 and the supply arrangement 1 20 w hich provides the supply passage 1 24 for supplying media supply l ines from on atmospheric env ironment of the v acuum chamber 1 30 to the deposition source. The supply arrangement 1 20 may be similar to the supply arrangement depicted in FIG. 2 so that reference can be made to the above explanations. In particular, the supply arrangement 120 may include the stiff tube element 2 10 which forms the supply passage for the media supply lines and the axially deflectable element 122 which partially surrounds the stiff tube element 2 1 0.
[ 0054] In particular, the ax ially deflectable element 1 22 may include a bellow or another expansion joint with a first end connected to an end of the stiff tube element protruding out of the vacuum chamber and a second end connected to a wall of the vacuum chamber. In particular, the second end of the axially deflectable element may be connected to an edge of an opening provided in the wall of the vacuum chamber.
[0055] According to some embodiments, which can be combined with embodiments described herein, the deposition apparatus 100 may include a drive unit 320 for mov ing the movable deposition source 1 1 0, as exemplarily shown in Fig. 3. The drive unit 320 may be configured to move the movable deposition source along the source transportation path, particularly in a l inear direction corresponding to the first direction 1 50. In some embodiments, the driving unit 320 is connected to or part of the supply arrangement. In particular, the drive unit 320 may be coupled to a portion of the supply arrangement 1 20. The supply arrangement 1 20 and the movable deposition source 1 10 may then be translated or moved together by the drive unit 320.
[0056] In some embodiments, the drive unit 320 may be arranged outside of the vacuum chamber 130, particularly coupled to a portion of the supply arrangement which protrudes out of the vacuum chamber. The drive unit 320 may be operated under atmospheric conditions which may allow for the use of a regular drive unit .
For example, the drive unit 320 may include a motor such as a linear motor configured for moving the stiff tube element. In particular, a wear-resistant and low -maintenance drive unit may be provided outside the vacuum chamber for mov ing the deposition source. Moreover, a drive unit 320 arranged outside of the vacuum chamber 1 30 can be supplied with pow er and control signals more easily. The drive unit 320 can be easily accessible. The supply arrangement 1 20 may offer more space for supply lines and the supply arrangement 1 20 may be reduced in size.
[ 0057] In some embodiments, which can be combined with embodiments described herein, the drive unit 320 may be coupled to a portion 3 1 0 of the stiff tube element 2 1 0 protruding out of the vacuum chamber. For example, the stiff tube element 2 10 may include a driven portion or a guided portion which is driven by the drive unit. For example, the driven portion may be situated at a first end of the stiff tube element 2 1 0, as is shown in Fig, 3. The stiff tube element 2 10 may convey the translation prov ided by the drive unit 320 to the movable deposition source 1 10.
[0058] In some embodiments, which can be combined with embodiments described herein, the stiff tube element 2 10 can be configured as a translation element configured for translating a driving force of the drive unit 320 to the movable deposition source 1 10. For example, the stiff tube element 2 1 0 may be moved by a motor such as a l inear motor that may be arranged outside the vacuum chamber.
[ 0059] In some embodiments, the deposition apparatus 100 may include a servicing area or maintenance area, wherein a closable passage 330 may be provided between the vacuum chamber and the servicing area, as is exemplarily depicted in Fig. 3. The closable passage 330 can be opened to move the deposition source between the vacuum chamber and the servicing area. The deposition source can be transferred into the servicing area, e.g.. for service or maintenance.
[0060] According to embodiments described herein, the media supply lines for supplying the deposition source may be guided out of the vacuum system via the supply passage, and not via the servicing area which is connected to the vacuum chamber with the closable passage 330. Accordingly, a servicing area with a reduced space may be provided. In some embodiments, it may even be possible to provide a deposition apparatus including a vacuum chamber, wherein no servicing area for servicing the deposition source may be prov ided as a separable compartment of the vacuum system next to the vacuum chamber. In part icular, the media supply lines may be directly fed from the deposition source through the supply passage to an atmospheric environment of the vacuum system. An outer dimension of the deposition apparatus may be reduced, when a smal ler servicing area or no servicing area at all may be needed as a separate compartment next to the deposition chamber. Further, no closable passage 330 between the vacuum chamber and a servicing area may be provided.
[006 ] ] In some embodiments, the vacuum chamber may include a passage, e.g. a servicing door, optionally w ith a valve, for opening and closing the vacuum chamber for accessing and serv icing the movable deposition source. For example, the servicing door may be used for at least one of exchanging a part of the deposition source, service or maintenance of any of the devices of the deposition source which are suppl ied by the media supply lines, repairing the deposition source, and/or accessing a part of the media supply lines which are not easil y accessible via the supply passage from an outside of the evacuated chamber.
[0062] According to another aspect of the present disclosure, a vacuum system is provided.
[0063] Fig. 4 shows a vacuum system 400 including a deposition apparatus according to any of the embodiments described herein. The deposition apparatus includes a vacuum chamber 130 and a movable deposition source arranged in the vacuum chamber 130. The vacuum system 400 may further include a second vacuum chamber 440. The second vacuum chamber 440 can be arranged adjacent to the vacuum chamber 130. A passage for moving one or more substrate between the vacuum chamber and the second vacuum chamber 440 may be provided. In particular, substrates to be coated may be transferred from the second vacuum chamber into the vacuum chamber through a passage, and coated substrates may be transferred from the vacuum chamber to the second vacuum chamber. The second vacuum chamber may be, e.g. a transit chamber, a routing module or a rotation module. [0064] In Fig. 4, the movable deposition source 1 1 0 includes a distribution pipe 41 0 which may be rotatabie. The distribution pipe 410 may extend along a length direction, particularly in an essentially vertical direction. The distribution pipe 41 0 may have one or more outlets to spray evaporated material 41 2 on a substrate 420. A surface of the substrate 420 may extend in the first direction, which is, for example, a direction of the source transportation path.
[0065] Fig. 4 shows two substrates which may be arranged opposite to each other. In particular, the source transportation path may extend in an area between the two substrates. In some embodiments, a mask for masking the layer deposition on a substrate can be provided between the substrate and the movable deposition source 1 10, for example in close proximity of the substrate. The distribution pipe 4 10 can be rotated, for example, rotated by about 180° from a first deposition area where a first substrate may be arranged to a second deposition area where a second substrate may be arranged, .
[0066] When the movable deposition source 1 10 is linearly moved in the first direction 1 50, the stiff tube element 2 1 0 may also move linearly in the first direction, as the stiff tube element is connected to the movable deposition source 1 10. The linear movement of the movable deposition source 1 10 may be guided by a transportation track 430 which may extend in the first direction. Accordingly, the media supply l ines 140 disposed in the supply passage 124 of the stiff tube element 2 10 can supply the movable deposition source 1 10 when it is mov ed. The axially deflectable element 1 22 may be deflected during a mov ement of the movable deposition source 1 10. Further, the axial ly deflectable element may provide a sealing between a main volume of the vacuum chamber and an environment of the vacuum chamber 130.
[0067] The second vacuum chamber 440 of the vacuum system 400 may include a rotating device 442. In particular, the second vacuum chamber 440 can be a rotation module. The rotating device 442 may be configured to receive one or more substrates. The rotating device 442 may be configured to change the orientation of the one or more substrates from a first orientation to a second orientation. For example, the orientation can be changed by rotating the substrate 420, figuratively illustrated by reference numeral 444. Changing the orientation can be useful, when a third vacuum chamber is not aligned with the second vacuum chamber 440, such as, for example, a third vacuum chamber connected to a gate valve 450. The substrate 420 can be then rotated by about 90° to transfer the substrate to the third vacuum chamber.
[0068] In some embodiments, which can be combined with embodiments described herein, the supply arrangement 120 of the deposition apparatus 100 extends at least partially out of the vacuum chamber 130. For example, the supply arrangement 120, in particular, the stiff tube clement 2 10, may protrude out of the vacuum chamber on a side of the vacuum chamber which is connected to the second vacuum chamber.
[0069] Fig. 5 shows a schematic side view of the vacuum system 400. The supply arrangement 1 20 extends out of the vacuum chamber 130 to a space next to. particularly below, the second vacuum chamber 440. In particular, the space below the second vacuum chamber 440 can be a space in an atmospheric environment. Accordingly, the drive unit 320 may be arranged in the space below the second vacuum chamber 440.
[0070] In some embodiments, a second deposition apparatus according to any of the embodiment* described herein may be arranged adjacent to the second vacuum chamber 440. In particular, the second deposition apparatus can be arranged at the opposite site of the second vacuum chamber 440 with respect to the first deposition apparatus.
[0071] The second deposition apparatus may include a second supply arrangement that may be configured according to the supply arrangement of any of the deposition apparatuses described herein. In particular, the second supply arrangement may include a stiff tube element which forms a supply passage for media supply lines for a second deposition source of the second deposition apparatus. Further, the second supply arrangement may include an axially deflectable element which may at least partially surround the stiff tube element and may be compressible and contractibie along the axis of the stiff tube element. The stiff tube element of the second supply arrangement may be arranged parallel to the stiff tube element of the supply arrangement of the first deposition source, e.g. with an offset therebetween, such that the stiff tube elements do not interfere with each other when protruding out of the respective vacuum chamber. Accordingly, both the supply arrangement and the second supply arrangement may be movable in the first direction 150, particularly parallel to each other.
[ 0072] In some embodiments, the supply arrangement and/or the second supply arrangement may extend into the space next to, particularly below, the second vacuum chamber 440. When operating the deposition apparatus, e.g. when mov ing the movable deposition source and/or the second deposition source, the supply arrangements may move next to each other into the space below the second vacuum chamber 440. This arrangement may be space saving and the footprint of the vacuum system 400 may be reduced.
[0073] As is schematically depicted in Fig. 5, the movable deposition source 1 10 may have an upper section 5 1 0 and a lower section 520. The lower section 520 can include a source cart that may be in contact with source tracks of the source transportation path. The upper section 5 10 may include one or more distribution pipes, e.g. the distribution pipe 4 1 0. Any of the first section and the second section may include an atmospheric enclosure or an atmospheric casing into which at least some of the media supply l ines are guided via the supply passage. The lower section 520 may be connected to the supply arrangement 1 20. in particular to the stiff tube element 2 10. Further, the low er section 520 may be in contact with the transportation track 430.
[0074] The upper section 5 1 0 may be detachably connected to the lower section 520, e.g. by a docking port 530. In some embodiments, the upper section 5 1 0 includes the distribution pipe 410. The distribution pipe may be rotatable with respect to the lower section 520. The docking port 530 can be a connecting part that couples the upper section 5 10 and the lower section 520. The docking port 530, which can also be described as a multi-coupling, can be utilized to remove the upper section 5 1 0 of the movable deposition source 1 10, for example, for maintenance, and to connect another upper section 5 10 to the lower section. In other words, the upper sections of the deposition source can be swapped. [0075 ] According to a further aspect of the present disclosure, a method of operating a deposition apparatus 100 is provided.
[0076 ] Fig. 6 is a diagram illustrating a method of operating a deposition apparatus 100. The method includes moving a movable deposition source 1 10 in a vacuum chamber 130 (box 610). The method further includes supplying the movable deposition source 1 10 with supply media via media supply l ines 140. The media supply lines may extend through a supply passage 124 of a supply arrangement 120, which includes an axially deflectable element 122 (box 620). In particular, the axially deflectable element 122 may axially contract or expand in a first direction when the movable deposition source 1 10 linearly moves in the first direction. The supply arrangement 1 20 may include some features or all the features of any of the supply arrangement of any of the deposition apparatuses described herein so that reference can be made to the above embodiments.
[0077 ] Moving the movable deposition source 1 10 may further include driving the mov able deposition source 1 1 0 by a drive unit coupled to a portion of the supply arrangement 1 20.
[0078] The driv e unit may be arranged outside the v acuum chamber 130. The driv e unit 320 may be coupled to a stiff tube element 2 10 of the supply arrangement 1 20 protruding outside the vacuum chamber 130.
[0079] While the foregoing is directed to embodiments of the disclosure, other and further embodiments of the disclosure may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.