Title:
DEPOSITION DEVICE CONTROL SYSTEM BASED ON INDUSTRIAL ETHERNET
Document Type and Number:
WIPO Patent Application WO/2024/051276
Kind Code:
A1
Abstract:
The present invention provides a deposition device control system based on the industrial Ethernet, comprising an upper computer, a terminal, a communication transmission link module, and a cavity control system. The terminal comprises a first switch and a terminal device; on the basis of the conventional Ethernet, the upper computer is in communication link with the terminal device by means of the first switch; one end of the communication transmission link module is connected to the first switch, and the other end of the communication transmission link module is connected to the cavity control system; the communication link between the terminal and the cavity control system is implemented on the basis of the industrial Ethernet; the cavity control system is in communication link with the communication transmission link module by means of the industrial Ethernet; and the cavity control system independently completes access in the cavity control system on the basis of the industrial Ethernet. The deposition device control system of the present invention has high communication transmission efficiency, and has higher data transmission reliability and hot plug connection flexibility, thereby improving the convenience of device production.
Inventors:
CUI HAIHONG (CN)
ZHOU YUN (CN)
SUNG WALEY WEITSUNG (CN)
ZHOU YUN (CN)
SUNG WALEY WEITSUNG (CN)
Application Number:
PCT/CN2023/102154
Publication Date:
March 14, 2024
Filing Date:
June 25, 2023
Export Citation:
Assignee:
BETONE TECH SHANGHAI INC (CN)
International Classes:
H04L67/12
Foreign References:
| CN106181007A | 2016-12-07 | |||
| CN114135526A | 2022-03-04 | |||
| KR20200111044A | 2020-09-28 |
Other References:
"Master's Thesis", 30 October 2016, BEIJING UNIVERSITY OF CHEMICAL TECHNOLOGY, CN, article QIN, WEIGUANG: "Research on Optimization of High-frequency Plasma Deposition Process Control System", pages: 1 - 86, XP009553156
Attorney, Agent or Firm:
J.Z.M.C. PATENT AND TRADEMARK LAW OFFICE (GENERAL PARTNERSHIP) (CN)
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