Title:
DEPOSITION DEVICE AND METHOD FOR MANUFACTURING DISPLAY DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/183552
Kind Code:
A1
Abstract:
In this deposition device (100), a substrate (120) is lowered so that only a first end section (126) thereof makes contact with a mask sheet (111) and then, the entirety of the substrate (120) gradually makes contact with the mask sheet (111), starting from the first end section (126) toward a second end section (127). When only the first end section (126) makes contact with the mask sheet (111), at least a portion (101a) of a touch plate (101) presses the substrate (120) toward the mask sheet (111).
Inventors:
WU ZHENGJIE
FUJIWARA SEIJI
FUJIWARA SEIJI
Application Number:
PCT/JP2019/009531
Publication Date:
September 17, 2020
Filing Date:
March 08, 2019
Export Citation:
Assignee:
SHARP KK (JP)
International Classes:
C23C14/24; C23C14/50
Foreign References:
| JP2008007857A | 2008-01-17 | |||
| JPS632150B2 | 1988-01-18 | |||
| JP2010157526A | 2010-07-15 | |||
| JP2018105853A | 2018-07-05 | |||
| JP2008156686A | 2008-07-10 | |||
| JP2008108596A | 2008-05-08 |
Attorney, Agent or Firm:
HARAKENZO WORLD PATENT & TRADEMARK (JP)
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