DEPOSITION DEVICE AND DEPOSITION METHOD

Title:

DEPOSITION DEVICE AND DEPOSITION METHOD

Document Type and Number:

WIPO Patent Application WO/2016/125648

Kind Code:

A1

Abstract:

When viewed in a plan view, a magnetic plate (10) has a first magnetic section (11) and a second magnetic section (12), and a magnetic section boundary (14) is slanted with respect to opening sides (26) and bent or curved so that magnetic fields exist along a plurality of mutually different directions.

Inventors:

KOBAYASHI YUHKI
KAWATO SHINICHI
NIBOSHI MANABU
TAKIZAWA KAZUO

Application Number:

PCT/JP2016/052283

Publication Date:

August 11, 2016

Filing Date:

January 27, 2016

Export Citation:

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Assignee:

SHARP KK (JP)

International Classes:

C23C14/24; H01L51/50; H05B33/10; H05B33/14

Domestic Patent References:

WO2009069743A1

2009-06-04

Foreign References:

JP2004146251A	2004-05-20
JPH0651905B2	1994-07-06
JP2002075639A	2002-03-15

Attorney, Agent or Firm:

HARAKENZO WORLD PATENT & TRADEMARK (JP)
Patent business corporation HARAKENZO WORLD PATENT & TRADEMARK (JP)

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