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Title:
DEPOSITION MASK
Document Type and Number:
WIPO Patent Application WO/2019/103320
Kind Code:
A1
Abstract:
An embodiment relates to a mask for deposition of a metal material for OLED pixel deposition. The mask for deposition comprises multiple effective portions for deposition; and non-effective portions other than the effective portions. The effective portions are arranged to be spaced apart from one another in the longitudinal direction. Each of the effective portions comprises: multiple effective areas arranged at the center thereof; and outer peripheral areas surrounding the multiple effective areas, respectively. Each of the effective areas comprises: multiple first small-area holes formed on one surface thereof; multiple first large-area holes formed on the other surface thereof opposite to the one surface; multiple first through-holes communicating with the first small-area holes and the first large-area holes; and a first island portion formed between the first through-holes. Each of the outer peripheral areas comprises: multiple second small-area holes formed on one surface thereof; multiple second large-area holes formed on the other surface thereof opposite to the one surface; multiple second through-holes communicating with the second small-area holes and the second large-area holes; and a second island portion formed between the second through-holes. The second through-holes are arranged to surround the effective area and are smaller than the first through-holes.

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Inventors:
CHO SU HYEON (KR)
SON HYO WON (KR)
Application Number:
PCT/KR2018/012488
Publication Date:
May 31, 2019
Filing Date:
October 22, 2018
Export Citation:
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Assignee:
LG INNOTEK CO LTD (KR)
International Classes:
H01L51/56; C23C14/04; C23F1/02; H01L51/00
Foreign References:
KR20170112673A2017-10-12
KR20150033386A2015-04-01
KR20160126856A2016-11-02
KR20160129639A2016-11-09
US20150340294A12015-11-26
Attorney, Agent or Firm:
HAW, Yong Noke (KR)
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