Title:
DEPRESSURIZATION DRYING DEVICE, DEPRESSURIZATION DRYING METHOD, AND METHOD FOR SHORTENING TIME REQUIRED FOR DEPRESSURIZATION DRYING PROCESS
Document Type and Number:
WIPO Patent Application WO/2022/234716
Kind Code:
A1
Abstract:
Provided is a depressurization drying device that dries a solution on a substrate in a depressurized state, wherein said device comprises a processing container that is configured to be depressurizable and that contains a substrate, a mounting base which is provided in the processing container and on which the substrate is mounted, a solvent-collecting part that collects a solvent in the solution vaporized from the substrate and discharged into the processing container along with a depressurization drying process, and a cooling part that cools the solvent-collecting part heated when the depressurized state in the processing container is terminated.
Inventors:
OIKAWA JUNJI (JP)
NASU TOSHIFUMI (JP)
UEDA TOSHIHIKO (JP)
HAYASHI TERUYUKI (JP)
SATAKE JUN (JP)
NASU TOSHIFUMI (JP)
UEDA TOSHIHIKO (JP)
HAYASHI TERUYUKI (JP)
SATAKE JUN (JP)
Application Number:
PCT/JP2022/010047
Publication Date:
November 10, 2022
Filing Date:
March 08, 2022
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
F26B5/04; H01L51/50; H05B33/10
Foreign References:
| JP2014199806A | 2014-10-23 | |||
| JP2018059697A | 2018-04-12 | |||
| JP2020190361A | 2020-11-26 | |||
| CN107940904A | 2018-04-20 | |||
| US20200358037A1 | 2020-11-12 |
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (JP)
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