Title:
DETECTION DEVICE AND METHOD FOR DIFFERENTIATING AND RECORDING POSITION OF SILICON WAFER
Document Type and Number:
WIPO Patent Application WO/2018/171148
Kind Code:
A1
Abstract:
A detection device and method for differentiating and recording the position of a silicon wafer (1). Slots of a silicon wafer box (2) are arranged in a trapezoidal manner, and the upper end thereof is provided with an opening, so that the edge of silicon wafers (1) at each layer may be observed when the silicon wafers are viewed from top to bottom; and an infrared distance sensor (7) is installed above the silicon wafer box (2); a signal transmitting path is along the vertical direction; an air cylinder (4) drives the sensor (7) to move in a straight line, and a signal transmitting diode of the sensor (7) transmits a signal to the silicon wafers (1) by means of an opening at the upper end of a silicon wafer box (2); signals are reflected by the edge of the silicon wafers (1) at each layer and received by a receiving diode; signals reflected by the silicon wafers (1) which are located at different layers are different, and the reflected signals are transmitted to an industrial personal computer (11) by means of an acquisition card (10); the industrial personal computer (11) analyzes and classifies the acquired signals by means of software, and a manipulator performs process operations according to data of the industrial personal computer (11).
Inventors:
YANG CONGBIN (CN)
TAO WENXIU (CN)
LIU ZHIFENG (CN)
WANG BING (CN)
WEN JUNWU (CN)
TAO WENXIU (CN)
LIU ZHIFENG (CN)
WANG BING (CN)
WEN JUNWU (CN)
Application Number:
PCT/CN2017/103077
Publication Date:
September 27, 2018
Filing Date:
September 25, 2017
Export Citation:
Assignee:
UNIV BEIJING TECHNOLOGY (CN)
International Classes:
G01B11/00; B25J9/12
Foreign References:
CN107131825A | 2017-09-05 | |||
CN1801471A | 2006-07-12 | |||
CN103376197A | 2013-10-30 | |||
CN102233311A | 2011-11-09 | |||
CN103412347A | 2013-11-27 | |||
CN101533796A | 2009-09-16 | |||
CN203337546U | 2013-12-11 | |||
US8167521B2 | 2012-05-01 | |||
JPH08222622A | 1996-08-30 |
Attorney, Agent or Firm:
BEIJING SIHAI TIANDA INTELLECTUAL PROPERTY AGENCY LTD. (CN)
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