Title:
DETECTION DEVICE AND DETECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2017/219448
Kind Code:
A1
Abstract:
Disclosed are a detection device (100) and a detection method. The detection device (100) comprises: a workbench (10); a pneumatic floating platform (20), wherein the pneumatic floating platform (20) is arranged on the workbench (10), and can rotate around its own axis, and the pneumatic floating platform (20) is used for placing an object to be detected; a tri-axial movable sliding table (30), wherein the tri-axial movable sliding table (30) is arranged on the workbench (10); a microscope objective imaging device (40), wherein the microscope objective imaging device (40) is slidably arranged on the tri-axial movable sliding table (30), and the microscope objective imaging device (40) is used for photographing the object on the pneumatic floating platform (20); and a microscope objective turntable (60), wherein the microscope objective turntable (60) is arranged on the microscope objective imaging device (40), and the microscope objective turntable (60) can drive the microscope objective imaging device (40) to rotate so as to image a surface to be detected of the object. The detection device (100) and the detection method can perform detection and digital evaluation on surface defects of an optical element, significantly improving detection efficiency and detection precision.
Inventors:
WU DONGCHENG (CN)
YANG HUIQI (CN)
QU YI (CN)
GAO SONGTAO (CN)
MIAO ERLONG (CN)
SUI YONGXIN (CN)
YANG HUAIJIANG (CN)
YANG HUIQI (CN)
QU YI (CN)
GAO SONGTAO (CN)
MIAO ERLONG (CN)
SUI YONGXIN (CN)
YANG HUAIJIANG (CN)
Application Number:
PCT/CN2016/092837
Publication Date:
December 28, 2017
Filing Date:
August 02, 2016
Export Citation:
Assignee:
CHANGCHUN INSTITUTE OF OPTICS FINE MECH AND PHYSICS CHINESE ACADEMY OF SCIENCE (CN)
International Classes:
G01N21/958
Foreign References:
| CN102620651A | 2012-08-01 | |||
| CN101236070A | 2008-08-06 | |||
| CN101839700A | 2010-09-22 | |||
| US5546179A | 1996-08-13 | |||
| CN204255866U | 2015-04-08 | |||
| CN203011843U | 2013-06-19 | |||
| CN205049107U | 2016-02-24 |
Attorney, Agent or Firm:
CHINA SCIENCE PATENT & TRADEMARK AGENT LTD. (CN)
Download PDF: