Title:
DETECTION DEVICE AND PRODUCTION METHOD FOR SAME
Document Type and Number:
WIPO Patent Application WO/2023/188760
Kind Code:
A1
Abstract:
According to the present invention, a detection device comprises: a substrate 10; a first piezoelectric thin film resonator 11a that comprises a first lower electrode 12a that is provided on the substrate, a first piezoelectric layer 14a that is provided on the first lower electrode, a first upper electrode 16a that is provided on the first piezoelectric layer, a first resonance region 50a at which the first lower electrode and the first upper electrode are opposite with at least a portion of the first piezoelectric layer therebetween, and a sensing film that is provided on the first upper electrode in the first resonance region; a second piezoelectric thin film resonator 11b that comprises a second lower electrode 12b that is provided on the substrate, a second piezoelectric layer 14b that is provided on the second lower electrode, a second upper electrode 16b that is provided on the second piezoelectric layer, and a second resonance region 50b at which the second lower electrode and the second upper electrode are opposite with at least a portion of the second piezoelectric layer therebetween; and a heater 31 that is provided on the substrate and controlled on the basis of the resonant frequency of the second piezoelectric thin film resonator.
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Inventors:
SAKASHITA TAKESHI (JP)
Application Number:
PCT/JP2023/002506
Publication Date:
October 05, 2023
Filing Date:
January 26, 2023
Export Citation:
Assignee:
TAIYO YUDEN KK (JP)
International Classes:
G01N5/02; H03H3/02; H03H9/17
Domestic Patent References:
| WO2019107446A1 | 2019-06-06 | |||
| WO2021172588A1 | 2021-09-02 |
Foreign References:
| US20100134209A1 | 2010-06-03 | |||
| US20080298427A1 | 2008-12-04 | |||
| KR101363269B1 | 2014-02-12 | |||
| US20100170324A1 | 2010-07-08 | |||
| US20200011827A1 | 2020-01-09 |
Attorney, Agent or Firm:
KATAYAMA, Shuhei (JP)
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