Title:
DETECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/145434
Kind Code:
A1
Abstract:
A detection device comprises a first electrode (16), a passive layer (17) provided on the first electrode, and a sensitive film (18) which is provided on the passive layer (17) and the mass of which changes due to adsorption thereon of a specific substance in a gas, the detection device comprising a first resonator (100), the resonance frequency of which changes in accordance with the change in said mass, and a detector for detecting the specific substance on the basis of a change in the resonance frequency of the first resonator (100).
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Inventors:
TAKANO TAKAYUKI (JP)
SAKASHITA TAKESHI (JP)
SAKASHITA TAKESHI (JP)
Application Number:
PCT/JP2023/000468
Publication Date:
August 03, 2023
Filing Date:
January 11, 2023
Export Citation:
Assignee:
TAIYO YUDEN KK (JP)
International Classes:
G01N5/02
Foreign References:
| JP2016065726A | 2016-04-28 | |||
| JP2007271449A | 2007-10-18 | |||
| JPH08220039A | 1996-08-30 | |||
| JP2021001877A | 2021-01-07 | |||
| JP2011080983A | 2011-04-21 | |||
| JP2011022129A | 2011-02-03 | |||
| JP2010020820A | 2010-01-28 | |||
| JP2016136102A | 2016-07-28 |
Attorney, Agent or Firm:
KATAYAMA, Shuhei (JP)
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