Title:
DETECTION METHOD AND SENSOR
Document Type and Number:
WIPO Patent Application WO/2012/143408
Kind Code:
A3
Abstract:
The invention relates to a method for the optomicromechanical path detection, for signal conversion and modification, and to transducers operating according to said method. For this purpose, a thin planar aperture element (300) is used, which can be moved relative to the surroundings and relative to defined light or radiation zones. Using specially formed passages (2), said element allows more or less light or comparable electromagnetic radiation to pass depending on the position. The radiation component or the luminous flux traveling through the passages forms a function that is dependent on the relative position or the relative angular position of the aperture element to the radiation zones. A photo or radiation detector (200) can convert the impinging radiant flux into electrical signals. The measured variables can be paths or angles, accelerations, forces, electrically or magnetically induced movements or pressure. It is possible to measure electric or magnetic field intensities, electric voltages or currents that are converted into movements via active capacitive or inductive actuators.
Inventors:
HORTSCHITZ WILFRIED (AT)
KOHL FRANZ (AT)
STEINER HARALD (AT)
SACHSE MATTHIAS (AT)
KOHL FRANZ (AT)
STEINER HARALD (AT)
SACHSE MATTHIAS (AT)
Application Number:
PCT/EP2012/057098
Publication Date:
December 27, 2012
Filing Date:
April 18, 2012
Export Citation:
Assignee:
OESTERREICHISCHE AKADEMIE DER WISSENSCHAFTEN (AT)
TECNET EQUITY NOE TECHNOLOGIEBETEILIGUNGS INVEST GMBH (AT)
HORTSCHITZ WILFRIED (AT)
KOHL FRANZ (AT)
STEINER HARALD (AT)
SACHSE MATTHIAS (AT)
TECNET EQUITY NOE TECHNOLOGIEBETEILIGUNGS INVEST GMBH (AT)
HORTSCHITZ WILFRIED (AT)
KOHL FRANZ (AT)
STEINER HARALD (AT)
SACHSE MATTHIAS (AT)
International Classes:
G01P1/02; G01D5/34; G01L1/04; G01P15/08; G01P15/093; G01R15/24; G01R33/028; G01R33/032; G01R33/038
Foreign References:
| US6484577B1 | 2002-11-26 | |||
| EP0810440A2 | 1997-12-03 | |||
| JP2006105764A | 2006-04-20 | |||
| US3731542A | 1973-05-08 | |||
| DE1092813B | 1960-11-10 | |||
| US20070085533A1 | 2007-04-19 | |||
| DE971878C | 1959-04-09 | |||
| US3412324A | 1968-11-19 | |||
| US4720631A | 1988-01-19 |
Other References:
DANIEL J VASQUEZ ET AL: "Optically-Interrogated Zero-Power MEMS Magnetometer", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, IEEE SERVICE CENTER, US, vol. 16, no. 2, 1 April 2007 (2007-04-01), pages 336 - 343, XP011176382, ISSN: 1057-7157, DOI: 10.1109/JMEMS.2007.892795
Attorney, Agent or Firm:
HUTZELMANN, Gerhard et al. (Schloß Osterberg, Osterberg, DE)
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