Title:
DETECTOR FOR ENVIRONMENTAL SCANNING ELECTRON MICROSCOPE
Document Type and Number:
WIPO Patent Application WO2004064098
Kind Code:
A3
Abstract:
A detector system for use in a scanning electron microscope. The detector system comprises means for supplying a primary electron beam to the surface of a sample positioned in the detector in use. A specimen is support positioned in the path of the primary electron beam; and first and second electrodes arranged to create an asymmetric field such that secondary electrons are attracted in use to the first electrode and excess ions are removed in use by the second electrode from the region of the sample which is irradiated by the primary electron beam. There is also means for amplifying the output of one of the electrodes to produce a detection signal.
Inventors:
BAKER FRANK (GB)
TOTH MILOS (GB)
TOTH MILOS (GB)
Application Number:
PCT/GB2004/000080
Publication Date:
October 21, 2004
Filing Date:
January 09, 2004
Export Citation:
Assignee:
UNIV CAMBRIDGE TECH (GB)
BAKER FRANK (GB)
TOTH MILOS (GB)
BAKER FRANK (GB)
TOTH MILOS (GB)
International Classes:
H01J37/244; H01J37/28; (IPC1-7): H01J37/244; H01J37/28
Foreign References:
| US5466936A | 1995-11-14 | |||
| US6365898B1 | 2002-04-02 |
Other References:
TOTH, M. ET AL.: "The role of induced contrast in images obtained using the environmental scanning electron microscope.", SCANNING, vol. 22, no. 6, December 2000 (2000-12-01), USA, pages 370 - 379, XP009034058, ISSN: 0161-0457, Retrieved from the Internet [retrieved on 20040720]
TOTH, M. ET AL.: "Electric fields produced by electron irradiation of insulators in a low vacuum environment.", JOURNAL OF APLIED PHYSICS, vol. 91, no. 7, 1 April 2002 (2002-04-01), pages 4492 - 4499, XP001182569
TOTH, M. ET AL.: "Electric fields produced by electron irradiation of insulators in a low vacuum environment.", JOURNAL OF APLIED PHYSICS, vol. 91, no. 7, 1 April 2002 (2002-04-01), pages 4492 - 4499, XP001182569
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