Title:
DETECTOR SYSTEM OF SECONDARY AND BACKSCATTERED ELECTRONS FOR A SCANNING ELECTRON MICROSCOPE
Document Type and Number:
WIPO Patent Application WO2005036583
Kind Code:
A3
Abstract:
The sytem is equiped in the microporous plate (9) that is placed between the lower scintillator (5) and the upper scintillator (12), where the lower scintillator (5) is on the sample stage (11) side. The movable diaphragm (14) with the hole (15) may be located between the front side of the photomultiplier (7) and the ends of the upper light pipe (13) and lower light pipe (6). Inside the intermediate chamber (3) at least one focusing electrode (8) may be placed, with its hole positioned coaxially with the hole in the microporous plate (9). The focusing electrode (8) may be located on the lower scintillator (5) surface.
Inventors:
SLOWKO WITOLD (PL)
Application Number:
PCT/PL2004/000078
Publication Date:
September 09, 2005
Filing Date:
October 06, 2004
Export Citation:
Assignee:
POLITECHNIKA WROCLAWSKA (PL)
SLOWKO WITOLD (PL)
SLOWKO WITOLD (PL)
International Classes:
H01J37/244; H01J37/28; (IPC1-7): H01J37/244; H01J37/28
Domestic Patent References:
| WO1998040906A1 | 1998-09-17 |
Foreign References:
| EP1271603A1 | 2003-01-02 | |||
| EP0767482A2 | 1997-04-09 | |||
| US6590210B1 | 2003-07-08 |
Other References:
PATENT ABSTRACTS OF JAPAN vol. 1995, no. 08 29 September 1995 (1995-09-29)
SLOWKO W: "Secondary electron detector with a micro-porous plate for environmental SEM", VACUUM, PERGAMON PRESS, GB, vol. 63, no. 4, 12 June 2000 (2000-06-12), pages 457 - 461, XP002268265, ISSN: 0042-207X
SLOWKO W: "Secondary electron detector with a micro-porous plate for environmental SEM", VACUUM, PERGAMON PRESS, GB, vol. 63, no. 4, 12 June 2000 (2000-06-12), pages 457 - 461, XP002268265, ISSN: 0042-207X
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