DETECTOR FOR WAVELENGTH OF EXCIMER LASER

Title:

DETECTOR FOR WAVELENGTH OF EXCIMER LASER

Document Type and Number:

WIPO Patent Application WO/1995/011432

Kind Code:

A1

Abstract:

This invention aims at obtaining stable reference light by using a low-voltage mercury lamp as a reference light source and 253.7-nm line emitted by a lamp in which at least 49 % specific isotope of mercury is sealed.

Inventors:

WAKABAYASHI OSAMU (JP)
KOBAYASHI YUKIO (JP)

Application Number:

PCT/JP1994/001766

Publication Date:

April 27, 1995

Filing Date:

October 20, 1994

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Assignee:

KOMATSU MFG CO LTD (JP)
WAKABAYASHI OSAMU (JP)
KOBAYASHI YUKIO (JP)

International Classes:

G01J9/02; G01J3/26; G03F7/20; H01S3/00; (IPC1-7): G01J9/00

Foreign References:

JPH03238329A	1991-10-24
JPH04198822A	1992-07-20
JPH053701B2	1993-01-18
JPH04301352A	1992-10-23
JPS5541693A	1980-03-24
JPH0479612A	1992-03-13

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