Title:
DETECTOR
Document Type and Number:
WIPO Patent Application WO/2018/078956
Kind Code:
A1
Abstract:
Provided is a detector which can ensure a space for disposing pixels in the vicinity of edges of neighboring reading chips due to the design of a counting circuit. This detector, which is a two-dimensional hybrid pixel array type detector that detects radiation, is provided with: a detecting unit which detects radiation entering a region in each of the pixels 115; and a plurality of reading chips 120 including counting circuits 121 respectively connected to the pixels 115, wherein the set pitch of the counting circuits 121 in a certain direction on a detection surface is smaller than that of the pixels 115, and regions respectively occupied by the pixels and the counting circuits corresponding to the pixels at least partially overlap, and connections between the pixels and the counting circuits are formed in the overlapping regions.
Inventors:
SAKUMURA TAKUTO
NAKAYE YASUKAZU
MATSUSHITA KAZUYUKI
MIKUSU SATOSHI
NAKAYE YASUKAZU
MATSUSHITA KAZUYUKI
MIKUSU SATOSHI
Application Number:
PCT/JP2017/024611
Publication Date:
May 03, 2018
Filing Date:
July 05, 2017
Export Citation:
Assignee:
RIGAKU DENKI CO LTD (JP)
International Classes:
H01L27/146; G01T7/00; H01L27/144; H04N5/32
Domestic Patent References:
| WO2003019659A2 | 2003-03-06 | |||
| WO1999045411A1 | 1999-09-10 |
Foreign References:
| JP2005501417A | 2005-01-13 | |||
| US20160015339A1 | 2016-01-21 | |||
| US20160097864A1 | 2016-04-07 | |||
| JP2002198509A | 2002-07-12 | |||
| JP2012185159A | 2012-09-27 | |||
| EP2463908A2 | 2012-06-13 |
Other References:
P. KRAFTA. BERGAMASCHICH. BROENNIMANNR. DINAPOLIE. F. EIKENBERRYB. HENRICHI. JOHNSONA. MOZZANICAC. M. SCHLEPUTZP. R. WILLMOTT: "Performance of single-photon-counting PILATUS detector modules", JOURNAL OF SYNCHROTRON RADIATION, vol. 16, 2009, pages 368 - 375
MARTEN JAN BOSMA: "On the Cutting Edge of Semiconductor Sensors", 21 December 2012, INSTITUTE FOR HIGH ENERGY PHYSICS
M. BOSMA: "On the cutting edge of semiconductor sensors. Towards intelligent X-ray detectors", PHD THESIS, 21 December 2012 (2012-12-21), XP055625324, Retrieved from the Internet
KRAFT ET AL.: "Characterization and Calibration of PILATUS Detectors", IEEE TRANSACTIONS ON NUCLEAR SCIENCE, vol. 56, no. 3, June 2009 (2009-06-01), XP011262661
See also references of EP 3534403A4
MARTEN JAN BOSMA: "On the Cutting Edge of Semiconductor Sensors", 21 December 2012, INSTITUTE FOR HIGH ENERGY PHYSICS
M. BOSMA: "On the cutting edge of semiconductor sensors. Towards intelligent X-ray detectors", PHD THESIS, 21 December 2012 (2012-12-21), XP055625324, Retrieved from the Internet
KRAFT ET AL.: "Characterization and Calibration of PILATUS Detectors", IEEE TRANSACTIONS ON NUCLEAR SCIENCE, vol. 56, no. 3, June 2009 (2009-06-01), XP011262661
See also references of EP 3534403A4
Attorney, Agent or Firm:
FUKUCHI Takeo (JP)
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