Title:
DETERMINING ALIGNMENT OF LAYERS IN A LAYERED PRODUCT
Document Type and Number:
WIPO Patent Application WO/2021/215915
Kind Code:
A8
Abstract:
A layered product (10) is provided with at least a lower product layer (120) comprising a first marker configuration(122) with at least a first marker (122a, 122b) and at least a higher product layer (130) that overlays the lower product layer, the at least a higher product layer comprising a second marker configuration (132) with at least a second marker (132a, 132b, 132c). The first marker configuration (122) and the second marker configuration (132) have mutually different physical properties.
Inventors:
MOHTASHAMI ABBAS (NL)
VAN NEER PAUL LOUIS MARIA JOSEPH (NL)
PIRAS DANIELE (NL)
HATAKEYAMA KODAI (NL)
QUESSON BENOIT ANDRÉ JACQUES (NL)
NAVARRO PAREDES VIOLETA (NL)
VAN NEER PAUL LOUIS MARIA JOSEPH (NL)
PIRAS DANIELE (NL)
HATAKEYAMA KODAI (NL)
QUESSON BENOIT ANDRÉ JACQUES (NL)
NAVARRO PAREDES VIOLETA (NL)
Application Number:
PCT/NL2021/050255
Publication Date:
June 02, 2022
Filing Date:
April 21, 2021
Export Citation:
Assignee:
TNO (NL)
International Classes:
G03F7/20; G01N29/06; G01Q60/32; G03F9/00
Attorney, Agent or Firm:
WITMANS, H.A. (NL)
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