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Patent Searching and Data


Title:
DETERMINING ALIGNMENT OF LAYERS IN A LAYERED PRODUCT
Document Type and Number:
WIPO Patent Application WO/2021/215915
Kind Code:
A8
Abstract:
A layered product (10) is provided with at least a lower product layer (120) comprising a first marker configuration(122) with at least a first marker (122a, 122b) and at least a higher product layer (130) that overlays the lower product layer, the at least a higher product layer comprising a second marker configuration (132) with at least a second marker (132a, 132b, 132c). The first marker configuration (122) and the second marker configuration (132) have mutually different physical properties.

Inventors:
MOHTASHAMI ABBAS (NL)
VAN NEER PAUL LOUIS MARIA JOSEPH (NL)
PIRAS DANIELE (NL)
HATAKEYAMA KODAI (NL)
QUESSON BENOIT ANDRÉ JACQUES (NL)
NAVARRO PAREDES VIOLETA (NL)
Application Number:
PCT/NL2021/050255
Publication Date:
June 02, 2022
Filing Date:
April 21, 2021
Export Citation:
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Assignee:
TNO (NL)
International Classes:
G03F7/20; G01N29/06; G01Q60/32; G03F9/00
Attorney, Agent or Firm:
WITMANS, H.A. (NL)
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