DEVELOPABLE BOTTOM ANTIREFLECTIVE COATING COMPOSITIONS FOR NEGATIVE RESISTS

WIPO Patent Application WO/2013/023124

A3

A negative developable bottom antireflective coating (NDBARC) material includes a polymer containing an aliphatic alcohol moiety, an aromatic moiety, and a carboxylic acid moiety. The NDBARC composition is insoluble in a typical resist solvent such as propylene glycol methyl ether acetate (PGMEA) after coating and baking. The NDBARC material also includes a photoacid generator, and optionally a crosslinking compound. In the NDBARC material, the carboxylic acid provides the developer solubility, while the alcohol alone, the carboxylic acid alone, or their combination provides the PGMEA resistance. The NDBARC material has resistance to the resist solvent, and thus, intermixing does not occur between NDBARC and resist during resist coating over NDBARC. After exposure and bake, the lithographically exposed portions of both the negative photoresist (30E) and the NDBARC layer (20E) become insoluble in developer due to the chemically amplified crosslinking of the polymers in negative resist and NDBARC layer in the lithographically exposed portions.

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CHEN KUANG-JUNG (US)
HOLMES STEVEN J (US)
HUANG WU-SONG (US)
LIU SEN (US)

PCT/US2012/050267

July 11, 2013

August 10, 2012

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IBM (US)
CHEN KUANG-JUNG (US)
HOLMES STEVEN J (US)
HUANG WU-SONG (US)
LIU SEN (US)

G03F7/004; C09D133/04; G03F7/039; G03F7/09

WO2009053832A2

2009-04-30

US20090087799A1	2009-04-02
US20100112475A1	2010-05-06
US20020172896A1	2002-11-21

See also references of EP 2742385A4

BROWN, Katherine, S. (2070 Route 52Bldg. 321, M/d 48, Hopewell Junction NY, US)

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