Title:
DEVELOPER CONCENTRATION MEASUREMENT DEVICE AND METHOD
Document Type and Number:
WIPO Patent Application WO/2020/155320
Kind Code:
A1
Abstract:
A developer concentration measurement device (100) and method. The developer concentration measurement device (100) comprises: a photoresist measurement module (11), a pipeline module (18), a concentration meter measurement module (13), a processing module (14), and a measurement auxiliary module (12). The concentration meter measurement module (13) is used to obtain data M. The measurement auxiliary module (12) is used to obtain data N. The processing module (14) determines whether the developer concentration measurement is accurate according to the difference between the data M and the data N.
More Like This:
Inventors:
CHAE JAEBYEUNG (CN)
LI YANZE (CN)
CHEN CHUNGJEN (CN)
DENG QIANG (CN)
JIN MINGGUANG (CN)
WANG ZHICHAO (CN)
WEI ZHIQIANG (CN)
HUANG JIADU (CN)
HE CHONGJIA (CN)
LI DEQUAN (CN)
LI YANZE (CN)
CHEN CHUNGJEN (CN)
DENG QIANG (CN)
JIN MINGGUANG (CN)
WANG ZHICHAO (CN)
WEI ZHIQIANG (CN)
HUANG JIADU (CN)
HE CHONGJIA (CN)
LI DEQUAN (CN)
Application Number:
PCT/CN2019/078088
Publication Date:
August 06, 2020
Filing Date:
March 14, 2019
Export Citation:
Assignee:
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECH CO LTD (CN)
International Classes:
G01N9/24; G03F7/32
Foreign References:
| CN106200281A | 2016-12-07 | |||
| CN1499949A | 2004-05-26 | |||
| CN1996152A | 2007-07-11 | |||
| CN104458823A | 2015-03-25 | |||
| CN103852978A | 2014-06-11 | |||
| JP2003004706A | 2003-01-08 | |||
| KR101395019B1 | 2014-05-14 |
Attorney, Agent or Firm:
ESSEN PATENT&TRADEMARK AGENCY (CN)
Download PDF:
Previous Patent: METHOD FOR HEATING CURING RESIN-BASED COMPOSITE MATERIAL USING DYNAMIC HEAT SHIELD
Next Patent: OLED DISPLAY SCREEN MODULE
Next Patent: OLED DISPLAY SCREEN MODULE