Title:
DEVICE FOR DETECTING CHARGED PARTICLES OR RADIATION
Document Type and Number:
WIPO Patent Application WO/2021/255853
Kind Code:
A1
Abstract:
A charged-particle detecting device 108, 108a, 108b, 108c, 108d, 108e, 108f, 108g or a radiation detecting device 203 detects charged particles or radiation as a detection target. These detection devices are each provided with: a scintillator 109 provided with a fluorescent layer 109a that converts the detection target into light 112; a light detector 111, 111b that detects the light 112 emitted from the scintillator 109; a light guide 110, 117 provided between the scintillator 109 and the light detector 111, 111b; and a blocking part 113, 114 that blocks a portion of the detection target incident on the scintillator 109 or the light emitted from the scintillator 109.
Inventors:
SARI LAILA AMBAR (JP)
IMAMURA SHIN (JP)
IWANAKA TAKUMU (JP)
SEKIGUCHI YOSHIFUMI (JP)
IMAMURA SHIN (JP)
IWANAKA TAKUMU (JP)
SEKIGUCHI YOSHIFUMI (JP)
Application Number:
PCT/JP2020/023741
Publication Date:
December 23, 2021
Filing Date:
June 17, 2020
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G01T1/20; H01J37/244
Domestic Patent References:
WO2012055504A1 | 2012-05-03 |
Foreign References:
JP2014153213A | 2014-08-25 | |||
JP2009222578A | 2009-10-01 | |||
JP2009085776A | 2009-04-23 | |||
JP2002296351A | 2002-10-09 | |||
JP2016118390A | 2016-06-30 | |||
JP2009053104A | 2009-03-12 |
Attorney, Agent or Firm:
HIRAKI & ASSOCIATES (JP)
Download PDF:
Previous Patent: CUTTING INSERT AND METHOD FOR MANUFACTURING CUTTING INSERT
Next Patent: PRINTING DEVICE AND PRINTING METHOD
Next Patent: PRINTING DEVICE AND PRINTING METHOD