Title:
DEVICE FOR DIVIDING AND FEEDING GAS FLOW FROM FLOW RATE- REGULATING DEVICE-EQUIPPED GAS-FEEDING EQUIPMENT TO CHAMBER
Document Type and Number:
WIPO Patent Application WO/2004/114038
Kind Code:
A1
Abstract:
A treatment gas with a predetermined flow rate (Q) is accurately and quickly divided and fed from gas feeding equipment having a flow rate regulating device into a chamber with a desired flow rate ratio (Q1/Q2). Opening/closing valve (OV1, OV2) are provided in branch feeding lines (GL1, GL2) for feeding a gas (G) with the predetermined flow rate (Q) to the chamber from a gas feeding equipment (1) having a flow rate-regulating device (QCS). Further provided are a bypass line (BL1) located on the downstream side of the valve (OV1) and branched from (GL1, BL2)located on the downstream side of the valve (OV2) and branched from (GL2), a pressure-type divisional flow rate regulator (FV) connected to the bypass line (BL1) and the bypass line (BL2), a pressure sensor (PS1) for measuring the pressure in the branch feeding line (GL1), and a pressure sensor (PS2) for measuring the pressure in the branch feeding line (GL2). With the structure above, the gas with a total amount of Q = Q1 + Q2 is fed in divided flows with desired divided flow rates (Q1, Q2) to the chamber (C) through shower plates (3, 4) fixed to terminals of branch feeding lines (GL1, GL2).
Inventors:
SUGIYAMA KAZUHIKO (JP)
IKEDA NOBUKAZU (JP)
NISHINO KOUJI (JP)
DOHI RYOUSUKE (JP)
UENOYAMA TOYOMI (JP)
IKEDA NOBUKAZU (JP)
NISHINO KOUJI (JP)
DOHI RYOUSUKE (JP)
UENOYAMA TOYOMI (JP)
Application Number:
PCT/JP2004/008117
Publication Date:
December 29, 2004
Filing Date:
June 10, 2004
Export Citation:
Assignee:
FUJIKIN KK (JP)
TOKYO ELECTRON LTD (JP)
SUGIYAMA KAZUHIKO (JP)
IKEDA NOBUKAZU (JP)
NISHINO KOUJI (JP)
DOHI RYOUSUKE (JP)
UENOYAMA TOYOMI (JP)
TOKYO ELECTRON LTD (JP)
SUGIYAMA KAZUHIKO (JP)
IKEDA NOBUKAZU (JP)
NISHINO KOUJI (JP)
DOHI RYOUSUKE (JP)
UENOYAMA TOYOMI (JP)
International Classes:
G05D7/06; H01L21/02; F17D1/04; H01L21/31; (IPC1-7): G05D7/06
Foreign References:
| JPH11265218A | 1999-09-28 | |||
| JPH1163265A | 1999-03-05 | |||
| JP2003323218A | 2003-11-14 | |||
| JP2004005308A | 2004-01-08 |
Attorney, Agent or Firm:
Sugimoto, Takeo (1-21, Kitahama 2-chome, Chuo-ku, Osaka-sh, Osaka 41, JP)
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