Title:
DEVICE FOR EMITTING VACUUM ULTRAVIOLET LIGHT
Document Type and Number:
WIPO Patent Application WO/2011/027881
Kind Code:
A1
Abstract:
A new device for emitting ultraviolet light, in particular, vacuum ultraviolet light, is provided in which the drawbacks of ultraviolet emitting devices currently in use, that is, the problems of large size, high electric-power consumption, short life, and unstable intensity, have been remedied. The device for emitting vacuum ultraviolet light is characterized by being equipped with: a light-emitting substrate comprising a transparent substrate constituted of lithium fluoride, magnesium fluoride, calcium fluoride, barium fluoride, or the like and, formed on the transparent substrate, a thin layer of a metal fluoride, such as LuLiF4, LaF3, BaF2, or CaF2, that has been doped with atoms of, for example, neodymium (Nd), thulium (Tm), or erbium (Er); and an electron beam source such as a thermal-electron gun or a field-emission electron gun. The device is further characterized in that the light-emitting substrate and the electron beam source are disposed in a vacuum atmosphere and that the electron beam source irradiates electron beams upon the thin metal fluoride layer to make the layer emit light containing a wavelength component of vacuum ultraviolet light.
Inventors:
ONO SHINGO (JP)
SUYAMA TOSHIHISA (JP)
FUKUDA KENTARO (JP)
ISHIZU SUMITO (JP)
KAWAGUCHI NORIAKI (JP)
NAGAMI TOMOHITO (JP)
YOSHIKAWA AKIRA (JP)
YANAGIDA TAKAYUKI (JP)
YOKOTA YUI (JP)
SUYAMA TOSHIHISA (JP)
FUKUDA KENTARO (JP)
ISHIZU SUMITO (JP)
KAWAGUCHI NORIAKI (JP)
NAGAMI TOMOHITO (JP)
YOSHIKAWA AKIRA (JP)
YANAGIDA TAKAYUKI (JP)
YOKOTA YUI (JP)
Application Number:
PCT/JP2010/065214
Publication Date:
March 10, 2011
Filing Date:
September 06, 2010
Export Citation:
Assignee:
NAT UNIVERSITY CORP NAGOYA INST OF TECHONOLOGY (JP)
TOKUYAMA CORP (JP)
UNIV TOHOKU (JP)
ONO SHINGO (JP)
SUYAMA TOSHIHISA (JP)
FUKUDA KENTARO (JP)
ISHIZU SUMITO (JP)
KAWAGUCHI NORIAKI (JP)
NAGAMI TOMOHITO (JP)
YOSHIKAWA AKIRA (JP)
YANAGIDA TAKAYUKI (JP)
YOKOTA YUI (JP)
TOKUYAMA CORP (JP)
UNIV TOHOKU (JP)
ONO SHINGO (JP)
SUYAMA TOSHIHISA (JP)
FUKUDA KENTARO (JP)
ISHIZU SUMITO (JP)
KAWAGUCHI NORIAKI (JP)
NAGAMI TOMOHITO (JP)
YOSHIKAWA AKIRA (JP)
YANAGIDA TAKAYUKI (JP)
YOKOTA YUI (JP)
International Classes:
H01J63/06; H01J61/44
Domestic Patent References:
WO2009031584A1 | 2009-03-12 |
Foreign References:
JP2006079873A | 2006-03-23 | |||
JP2007294698A | 2007-11-08 | |||
JPH0689075A | 1994-03-29 | |||
JP2006190541A | 2006-07-20 |
Other References:
SHUJI MAEO ET AL.: "KMgF3 Kessho no Shinku Shigaisen Hakko Tokusei", ASSOCIATION FOR CONDENSED MATTER PHOTOPHYSICS RONBUNSHU, vol. 20, 11 December 2009 (2009-12-11), pages 445 - 448, XP008154735
Y. SUZUKI ET AL.: "Hybrid time-resolved spectroscopic system for evaluating laser material using a table-top-sized, low-jitter, 3-MeV picoseconds electron-beam source with a photocathode", APPLIED PHYSICS LETTERS, vol. 80, 2002, pages 3280 - 3282
Y. SUZUKI ET AL.: "Hybrid time-resolved spectroscopic system for evaluating laser material using a table-top-sized, low-jitter, 3-MeV picoseconds electron-beam source with a photocathode", APPLIED PHYSICS LETTERS, vol. 80, 2002, pages 3280 - 3282
Attorney, Agent or Firm:
ONO, Hisazumi et al. (JP)
Ono Pure in addition (JP)
Ono Pure in addition (JP)
Download PDF: