Title:
DEVICE EQUIPPED WITH COOLING MEANS AND COOLING METHOD
Document Type and Number:
WIPO Patent Application WO/2005/111258
Kind Code:
A1
Abstract:
In the arrangement of a refrigerant passage of a vacuum chamber which is used for film formation by vacuum deposition or the like, the work period is shortened by reducing the amount of the cooling tube to be used and lowering in the flow rate of the refrigerant is suppressed by shortening the refrigerant passage. The device comprises a chamber covered with a chamber wall, an internal mechanism arranged in the chamber or an external mechanism arranged outside the chamber, and at least one refrigerant passage for cooling the internal mechanism or the external mechanism, and at least a part of the refrigerant passage forms a part of the chamber wall.
Inventors:
TAKIMOTO MASAYUKI (JP)
FUSE YUTAKA (JP)
ABE TATSUMI (JP)
KOMURO HIROYUKI (JP)
AONAHATA KAZUHITO (JP)
FUSE YUTAKA (JP)
ABE TATSUMI (JP)
KOMURO HIROYUKI (JP)
AONAHATA KAZUHITO (JP)
Application Number:
PCT/JP2005/000849
Publication Date:
November 24, 2005
Filing Date:
January 24, 2005
Export Citation:
Assignee:
SHOWA SHINKU KK (JP)
TAKIMOTO MASAYUKI (JP)
FUSE YUTAKA (JP)
ABE TATSUMI (JP)
KOMURO HIROYUKI (JP)
AONAHATA KAZUHITO (JP)
TAKIMOTO MASAYUKI (JP)
FUSE YUTAKA (JP)
ABE TATSUMI (JP)
KOMURO HIROYUKI (JP)
AONAHATA KAZUHITO (JP)
International Classes:
F25D17/02; B01J3/00; C23C14/22; C23C14/24; F25D23/06; (IPC1-7): C23C14/24; F25D17/02
Foreign References:
| JPH03179742A | 1991-08-05 | |||
| JP2000310694A | 2000-11-07 | |||
| JP2004183100A | 2004-07-02 |
Attorney, Agent or Firm:
Okabe, Masao (Fuji Bldg. 2-3, Marunouchi 3-chom, Chiyoda-ku Tokyo 05, JP)
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