Title:
DEVICE FOR ESTABLISHING A BONDING CONNECTION AND TRANSDUCER THEREFOR
Document Type and Number:
WIPO Patent Application WO/2016/004919
Kind Code:
A3
Abstract:
The invention relates to a device for establishing a bonding connection, comprising a bonding head mounted so as to rotate about an axis of rotation, and a transducer (1) mounted on the bonding head, where the transducer (1) has a piezo actuator (5) for generating ultrasonic vibration, in particular a natural ultrasonic vibration, a fastening section (6) for attaching the transducer (1) to the bonding head and a tool holder (3) for a bonding tool (2), a longitudinal extension (8) of the transducer (1) and/or an extension of the same in the direction of an axis of a minimum inertial moment runs parallel to the axis of rotation of the bonding head, electrodes (20) being provided on the piezo actuator (5) in such a way that the piezo actuator (5) can be excited by an electric field in a field direction (10) transverse to a polarisation direction (9) of the piezo actuator, and as a result of the excitation and of the connection of the piezo actuator (5) to the fastening section (6) and to the tool holder (3), the piezo actuator (5) carries out a shearing motion in a shearing plane (18) formed by the polarisation direction (9) and by the field direction (10).
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Inventors:
HUNSTIG MATTHIAS (DE)
BRÖKELMANN MICHAEL (DE)
BRÖKELMANN MICHAEL (DE)
Application Number:
PCT/DE2015/100277
Publication Date:
March 03, 2016
Filing Date:
July 02, 2015
Export Citation:
Assignee:
HESSE GMBH (DE)
International Classes:
B23K20/10; B23K20/00; H01L21/67; H01L23/00; H01L41/09; B23K101/42
Foreign References:
| DE102009003312A1 | 2010-04-15 | |||
| US20130335487A1 | 2013-12-19 | |||
| US20090268326A1 | 2009-10-29 |
Attorney, Agent or Firm:
WICKORD, Wiro (Paderborn, DE)
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