Title:
DEVICE FOR GENERATING PLASMA AND DIRECTING AN ELECTRON BEAM TOWARDS A TARGET
Document Type and Number:
WIPO Patent Application WO/2013/186697
Kind Code:
A3
Abstract:
A device (2; 2I; 2II; 2IV; 2V; 2VI; 2VII; 2VIII) for generating plasma and for directing an electron beam towards a target (3); the device (2; 2I; 2II; 2IV; 2V; 2VI; 2VII; 2VIII) comprises a hollow element (5); an activation group (21), which is designed to impose a difference in potential between the hollow element (5) and another element which is separate from it, in such a way as to direct the electron beam towards said separate element; and a de Laval nozzle (23), having at least one tapered portion (13), which is tapered towards the separate element and is designed to accelerate a gas flow towards the separate element.
Inventors:
SKOCDOPOLOVA LIBUSE (IT)
Application Number:
PCT/IB2013/054765
Publication Date:
February 27, 2014
Filing Date:
June 11, 2013
Export Citation:
Assignee:
NOIVION S R L (IT)
International Classes:
H01J3/02; H01J37/077; H01J37/32; H01J37/34
Domestic Patent References:
| WO2012025947A1 | 2012-03-01 |
Foreign References:
| FR1374245A | 1964-10-02 | |||
| US7183564B2 | 2007-02-27 | |||
| FR2498010A1 | 1982-07-16 |
Attorney, Agent or Firm:
Ponchiroli, Simone (Via Caprera 6, Verona, IT)
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