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Title:
DEVICE FOR GENERATING PLASMA AND DIRECTING AN ELECTRON BEAM TOWARDS A TARGET
Document Type and Number:
WIPO Patent Application WO/2013/186697
Kind Code:
A3
Abstract:
A device (2; 2I; 2II; 2IV; 2V; 2VI; 2VII; 2VIII) for generating plasma and for directing an electron beam towards a target (3); the device (2; 2I; 2II; 2IV; 2V; 2VI; 2VII; 2VIII) comprises a hollow element (5); an activation group (21), which is designed to impose a difference in potential between the hollow element (5) and another element which is separate from it, in such a way as to direct the electron beam towards said separate element; and a de Laval nozzle (23), having at least one tapered portion (13), which is tapered towards the separate element and is designed to accelerate a gas flow towards the separate element.

Inventors:
Skocdopolova, Libuse (Via F.lli Cervi 21, Bologna, I-40129, IT)
Application Number:
IB2013/054765
Publication Date:
February 27, 2014
Filing Date:
June 11, 2013
Export Citation:
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Assignee:
NOIVION S.R.L. (Piazza Manifattura 1, Rovereto, I-38068, IT)
International Classes:
H01J3/02; H01J37/077; H01J37/32; H01J37/34
Domestic Patent References:
WO2012025947A12012-03-01
Foreign References:
FR1374245A1964-10-02
US7183564B22007-02-27
FR2498010A11982-07-16
Attorney, Agent or Firm:
Ponchiroli, Simone (Ruffini Ponchiroli e Associati S.r.l, Via Caprera 6, Verona, I-37126, IT)
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