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Title:
DEVICE FOR GENERATING UV LIGHT
Document Type and Number:
WIPO Patent Application WO/2011/128443
Kind Code:
A2
Abstract:
The invention relates to a plasma chamber (1) for generating UV light and/or VUV light, having simple construction and allowing directed emission of UV light.

Inventors:
EGNER SIEGFRIED (DE)
LOHNER ALEXANDER (DE)
JAVAID ALI IMRAN (DE)
GILLNER ARNOLD (DE)
NADRAG WALTER (AT)
Application Number:
PCT/EP2011/056050
Publication Date:
October 20, 2011
Filing Date:
April 15, 2011
Export Citation:
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Assignee:
FRAUNHOFER GES FORSCHUNG (DE)
EGNER SIEGFRIED (DE)
LOHNER ALEXANDER (DE)
JAVAID ALI IMRAN (DE)
GILLNER ARNOLD (DE)
NADRAG WALTER (AT)
SICO TECHNOLOGY GMBH (AT)
International Classes:
H01J65/04; H01J5/04; H01J5/24
Domestic Patent References:
WO2002047102A22002-06-13
WO1998037962A11998-09-03
Foreign References:
DE4136297A11993-05-06
DE19955671A12001-05-31
DE4109895C21994-11-24
DE102006022970B32007-11-22
US5923116A1999-07-13
US20070228300A12007-10-04
Attorney, Agent or Firm:
DREISS Patentanwälte (DE)
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