Title:
DEVICE INSPECTION APPARATUS AND DEVICE INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2022/224843
Kind Code:
A1
Abstract:
A device inspection apparatus according to one aspect of the present disclosure comprises: a voltage source which applies a voltage to a device to be inspected; a plurality of resistors which are connected in series between the voltage source and the device; a detection unit which detects a potential difference between both terminals of a resistor group including one or more resistors among the plurality of resistors; a switch unit which switches, from the plurality of resistors, the resistor group for which the detection unit detects the potential difference; and a control unit, wherein the control unit is configured to control the detection unit and the switch unit so that the potential difference between both terminals of each of at least two different resistor groups is detected and the potential difference is detected in ascending order of summed resistance values of both terminals of the resistor group.
Inventors:
KUREBAYASHI SHINYA (JP)
Application Number:
PCT/JP2022/017349
Publication Date:
October 27, 2022
Filing Date:
April 08, 2022
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
G01R15/09; G01R31/26; G01R31/28
Domestic Patent References:
| WO1999028756A1 | 1999-06-10 |
Foreign References:
| JPS63135881A | 1988-06-08 | |||
| US5543728A | 1996-08-06 | |||
| JP2005167429A | 2005-06-23 | |||
| JPH116860A | 1999-01-12 | |||
| JP2015045640A | 2015-03-12 | |||
| JP2009139223A | 2009-06-25 | |||
| JPS62206455A | 1987-09-10 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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