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Title:
DEVICE FOR MEASURING MEAN FREE PATH, VACUUM GAUGE, AND METHOD FOR MEASURING MEAN FREE PATH
Document Type and Number:
WIPO Patent Application WO/2011/033933
Kind Code:
A1
Abstract:
Disclosed are a device for measuring the mean free path, a vacuum gauge, and a method for measuring the mean free path, which enable the direct measurement of the mean free path of charged particles. Specifically disclosed is a device for measuring the mean free path, which is provided with an ion source for generating ions, a collector (24a) for detecting the first charged particle number of charged particles having a first flight distance (L1) that is a flight distance of 0 or more from the ion source, and a collector (24b) for detecting the second charged particle number of charged particles having a second flight distance longer than the first flight distance. A control unit of the device calculates the mean free path from the ratio between the first and second charged particle numbers.

Inventors:
SHIOKAWA Yoshiro (2-5-1Kurigi, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
塩川 善郎 (〒50 神奈川県川崎市麻生区栗木2-5-1 キヤノンアネルバ株式会社内 Kanagawa, 〒2158550, JP)
NAKAMURA Megumi (2-5-1Kurigi, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
Application Number:
JP2010/064917
Publication Date:
March 24, 2011
Filing Date:
September 01, 2010
Export Citation:
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Assignee:
CANON ANELVA CORPORATION (2-5-1, Kurigi Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
キヤノンアネルバ株式会社 (〒50 神奈川県川崎市麻生区栗木2-5-1 Kanagawa, 〒2158550, JP)
SHIOKAWA Yoshiro (2-5-1Kurigi, Asao-ku, Kawasaki-sh, Kanagawa 50, 〒2158550, JP)
塩川 善郎 (〒50 神奈川県川崎市麻生区栗木2-5-1 キヤノンアネルバ株式会社内 Kanagawa, 〒2158550, JP)
International Classes:
G01L21/32
Domestic Patent References:
2008-02-28
Foreign References:
JP2001044108A2001-02-16
JP2001165907A2001-06-22
JP2001166100A2001-06-22
JPH06145974A1994-05-27
Attorney, Agent or Firm:
OKABE Yuzuru et al. (No.602, Fuji Bldg. 2-3, Marunouchi 3-chome, Chiyoda-k, Tokyo 05, 〒1000005, JP)
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