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Title:
DEVICE FOR MEASURING MEAN FREE PATH, VACUUM GAUGE, AND METHOD FOR MEASURING MEAN FREE PATH
Document Type and Number:
WIPO Patent Application WO/2011/033933
Kind Code:
A1
Abstract:
Disclosed are a device for measuring the mean free path, a vacuum gauge, and a method for measuring the mean free path, which enable the direct measurement of the mean free path of charged particles. Specifically disclosed is a device for measuring the mean free path, which is provided with an ion source for generating ions, a collector (24a) for detecting the first charged particle number of charged particles having a first flight distance (L1) that is a flight distance of 0 or more from the ion source, and a collector (24b) for detecting the second charged particle number of charged particles having a second flight distance longer than the first flight distance. A control unit of the device calculates the mean free path from the ratio between the first and second charged particle numbers.

Inventors:
SHIOKAWA YOSHIRO (JP)
NAKAMURA MEGUMI (JP)
PENG QIANG (JP)
Application Number:
PCT/JP2010/064917
Publication Date:
March 24, 2011
Filing Date:
September 01, 2010
Export Citation:
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Assignee:
CANON ANELVA CORP (JP)
SHIOKAWA YOSHIRO (JP)
NAKAMURA MEGUMI (JP)
PENG QIANG (JP)
International Classes:
G01L21/32
Domestic Patent References:
WO2008024825A22008-02-28
Foreign References:
JP2001044108A2001-02-16
JP2001165907A2001-06-22
JP2001166100A2001-06-22
JPH06145974A1994-05-27
Attorney, Agent or Firm:
OKABE Yuzuru et al. (JP)
Okabe 讓 (JP)
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