Title:
DEVICE AND METHOD FOR CRYSTALLIZING ITO BY USING LASER
Document Type and Number:
WIPO Patent Application WO/2018/070620
Kind Code:
A1
Abstract:
A device and a method for crystallizing ITO by using a laser are disclosed. A method for crystallizing ITO, according to another aspect of the present invention, comprises the steps of: forming an amorphous ITO layer on a film or glass at a room temperature; forming a metal layer on the amorphous ITO layer; partially crystallizing the amorphous ITO layer by using a laser and a mask; and removing the metal layer and amorphous ITO, which is not crystallized, by using an etching solution.
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Inventors:
LEE CHANKOO (KR)
BAE HYUNSEOP (KR)
BAE HYUNSEOP (KR)
Application Number:
PCT/KR2017/001519
Publication Date:
April 19, 2018
Filing Date:
February 13, 2017
Export Citation:
Assignee:
WI A CORP (KR)
International Classes:
G06F3/044; H01L31/18; B23K101/36
Foreign References:
KR20140143320A | 2014-12-16 | |||
KR20150089605A | 2015-08-05 | |||
KR20130092022A | 2013-08-20 | |||
KR20100035247A | 2010-04-05 | |||
US20110236597A1 | 2011-09-29 |
Attorney, Agent or Firm:
PARK, Jinsoo (KR)
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