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Patent Searching and Data


Title:
DEVICE AND METHOD FOR EVACUATING A CHAMBER AND PURIFYING THE GAS EXTRACTED FROM SAID CHAMBER
Document Type and Number:
WIPO Patent Application WO/2013/087713
Kind Code:
A3
Abstract:
The invention relates to a device for evacuating a chamber (14) and for purifying the gas extracted from said chamber (14) of any foreign substances. The device comprises a dry-condensing vacuum pump (15) having an input (17) connected to the chamber to be evacuated (14) and which is suitable for maintaining the input pressure at a constant level at the output (18) despite variable conditions. An intermediate line (19) which connects to the output (18) of the dry-condensing vacuum pump (15) and a liquid ring vacuum pump (20), the input of which is connected to the intermediate line (19), are additionally provided. The invention also relates to a corresponding method. The invention makes it possible to purify the gas of any foreign substances reliably and effectively.

Inventors:
KÖSTERS, Heiner (Buschweg 3, Itzehoe, 25524, DE)
GOTTSCHLICH, Uwe (Ohlanden 25, Hohenaspe, 25582, DE)
Application Number:
EP2012/075262
Publication Date:
June 20, 2013
Filing Date:
December 12, 2012
Export Citation:
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Assignee:
STERLING INDUSTRY CONSULT GMBH (Lindenstraße 170, Itzehoe, 25509, DE)
International Classes:
F04B41/06; F04C19/00; F04C23/00
Domestic Patent References:
WO1989012169A11989-12-14
Foreign References:
FR1129872A1957-01-28
US3956072A1976-05-11
Attorney, Agent or Firm:
GLAWE DELFS MOLL, HAMBURG (Postfach 13 03 91, Hamburg, 20103, DE)
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