Title:
DEVICE AND METHOD FOR EVACUATION
Document Type and Number:
WIPO Patent Application WO/1999/060272
Kind Code:
A1
Abstract:
A device and method for evacuation capable of evacuating, for example, a vacuum chamber (process chamber) of a semiconductor manufacturing device, comprising the vacuum chamber (10), an exhaust pipe (34) for joining the vacuum chamber (10) to an atmospheric pressure opening part, a variable speed vacuum pump (32) connected to the exhaust pipe (34), and a control part (42) for controlling the speed of the vacuum pump (32).
Inventors:
ARAI SATOSHI (JP)
USUI KATSUAKI (JP)
ISOZAKI TAKAHIRO (JP)
USUI KATSUAKI (JP)
ISOZAKI TAKAHIRO (JP)
Application Number:
PCT/JP1999/002645
Publication Date:
November 25, 1999
Filing Date:
May 20, 1999
Export Citation:
Assignee:
EBARA CORP (JP)
ARAI SATOSHI (JP)
USUI KATSUAKI (JP)
ISOZAKI TAKAHIRO (JP)
ARAI SATOSHI (JP)
USUI KATSUAKI (JP)
ISOZAKI TAKAHIRO (JP)
International Classes:
F04D27/00; F04B37/08; F04B49/06; F04D19/04; F04D27/02; (IPC1-7): F04B49/06; F04B37/16
Foreign References:
JPH09317641A | 1997-12-09 | |||
JPH05195984A | 1993-08-06 | |||
JPH0242186A | 1990-02-13 | |||
JPH01106980A | 1989-04-24 | |||
JPH06311778A | 1994-11-04 | |||
JPH03152350A | 1991-06-28 | |||
JPH08319946A | 1996-12-03 |
Other References:
See also references of EP 1081380A4
Attorney, Agent or Firm:
Watanabe, Isamu (4th floor 5-8, Nishi-Shinjuku 7-chome Shinjuku-ku Tokyo, JP)
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