Title:
DEVICE AND METHOD FOR INSPECTING ELECTRONIC COMPONENT
Document Type and Number:
WIPO Patent Application WO/2017/056607
Kind Code:
A1
Abstract:
The present invention is provided with: an inspection chamber (20) in which an electronic component W is inspected; a transport mechanism (22) provided inside the inspection chamber (20), said transport mechanism (22) transporting, for inspection purposes, the electronic component W supplied to the inspection chamber (20); a first dry gas supply part (50) for supplying dry gas to a first space (S1) in the inspection chamber (20), the first space (S1) being on one surface side of the transport mechanism (22); and a second dry gas supply part (52) for supplying dry gas to a second space (S2) in the inspection chamber (20), the second space (S2) being on the other surface side of the transport mechanism (22). The first space (S1) is at least as wide as the second space (S2), and the pressure at which dry gas is supplied by the second dry gas supply part (52) is higher than the pressure at which dry gas is supplied by the first dry gas supply part (50).
Inventors:
ASAKURA HIDEKI (JP)
FUJITA KENGO (JP)
SUGANO AKIO (JP)
MAEZAWA NOBUAKI (JP)
FUJITA KENGO (JP)
SUGANO AKIO (JP)
MAEZAWA NOBUAKI (JP)
Application Number:
PCT/JP2016/069422
Publication Date:
April 06, 2017
Filing Date:
June 30, 2016
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
TOKYO WELD CO LTD (JP)
TOKYO WELD CO LTD (JP)
International Classes:
G01R31/26
Foreign References:
| JP2002068471A | 2002-03-08 | |||
| JP2009105339A | 2009-05-14 | |||
| JPH06148268A | 1994-05-27 | |||
| JPH11142469A | 1999-05-28 | |||
| US20100108205A1 | 2010-05-06 | |||
| JPS62187263A | 1987-08-15 | |||
| JPH10274667A | 1998-10-13 | |||
| JP2006292590A | 2006-10-26 |
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (JP)
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