DEVICE AND METHOD FOR MANUFACTURING GAS-DISSOLVED WATER

Title:

DEVICE AND METHOD FOR MANUFACTURING GAS-DISSOLVED WATER

Document Type and Number:

WIPO Patent Application WO/2016/042740

Kind Code:

A1

Abstract:

　A device (1) for manufacturing ozone water, provided with flow rate controllers (4, 5) for controlling the flow rate of a gas used as a raw material, a flow rate meter (12) for measuring the flow rate of water used as a raw material, a booster pump (13) for controlling the pressure of the water, an ozone water generation unit (8) for mixing ozone gas and water and generating ozone water, and a pressure sensor (17) for measuring the pressure of the ozone water supplied to a use point (19). The booster pump (13) controls the pressure of the water such that the pressure of the ozone water measured by the pressure sensor (17) is uniform, and the flow rate controllers (4, 5) control the flow rate of the gas according to the flow rate of the water as measured by the flow rate meter (12).

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Inventors:

OZAWA SUGURU (JP)
HARADA MINORU (JP)
TAKAHASHI MUNEHITO (JP)

Application Number:

PCT/JP2015/004586

Publication Date:

March 24, 2016

Filing Date:

September 09, 2015

Export Citation:

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Assignee:

EBARA CORP (JP)

International Classes:

B01F15/02; B01F1/00; B01F3/04; B01F5/04; B01F15/04; C01B13/10; C01B13/11; C02F1/78; H01L21/304

Foreign References:

JPH09906A	1997-01-07
JP2014166629A	2014-09-11
JP2008012512A	2008-01-24
JP2003334433A	2003-11-25
JP2010207724A	2010-09-24
JP2010234298A	2010-10-21
JP2012196589A	2012-10-18
JP2002020105A	2002-01-23
JP2009114003A	2009-05-28
JP2013103205A	2013-05-30
JP2000107509A	2000-04-18

Other References: