Title:
DEVICE AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2014/081001
Kind Code:
A1
Abstract:
This device comprises: a substrate which contains a well region of one conductivity type; an element isolation insulating film which is arranged within the well region; an island-shaped active region which is surrounded by the element isolation insulating film; two first gate structures which are arranged on the island-shaped active region, and each of which is configured by sequentially laminating a lower gate insulating film, a gate insulating film having a high dielectric constant, a first gate electrode film containing a metal material, and a second gate electrode film; and a second gate structure which comprises a second gate electrode film that is in contact with and cover a part of the element isolation insulating film. The two first gate structures and the second gate structure are successively arranged in the order of one first gate structure, the second gate structure and the other first gate structure.
Inventors:
NAGAI TAKESHI (JP)
Application Number:
PCT/JP2013/081477
Publication Date:
May 30, 2014
Filing Date:
November 22, 2013
Export Citation:
Assignee:
PS4 LUXCO SARL (LU)
NAGAI TAKESHI (JP)
NAGAI TAKESHI (JP)
International Classes:
H01L21/8238; H01L21/336; H01L27/092; H01L29/78
Domestic Patent References:
| WO2011121738A1 | 2011-10-06 |
Foreign References:
| JP2012109378A | 2012-06-07 |
Attorney, Agent or Firm:
IKEDA, Noriyasu et al. (JP)
Noriyasu Ikeda (JP)
Noriyasu Ikeda (JP)
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